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Virtual Journal for Biomedical Optics

Virtual Journal for Biomedical Optics


  • Editor: Gregory W. Faris
  • Vol. 2, Iss. 6 — Jun. 13, 2007

Imaging interferometric microscopy–approaching the linear systems limits of optical resolution

Yuliya Kuznetsova, Alexander Neumann, and S. R. J. Brueck  »View Author Affiliations

Optics Express, Vol. 15, Issue 11, pp. 6651-6663 (2007)

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The linear systems optical resolution limit is a dense grating pattern at a λ/2 pitch or a critical dimension (resolution) of λ/4. However, conventional microscopy provides a (Rayleigh) resolution of only ~ 0.6λ/NA, approaching λ/1.67 as NA → 1. A synthetic aperture approach to reaching the λ/4 linear-systems limit, extending previous developments in imaging-interferometric microscopy, is presented. Resolution of non-periodic 180-nm features using 633-nm illumination (λ/3.52) and of a 170-nm grating (λ/3.72) is demonstrated. These results are achieved with a 0.4-NA optical system and retain the working distance, field-of-view, and depth-of-field advantages of low-NA systems while approaching ultimate resolution limits.

© 2007 Optical Society of America

OCIS Codes
(180.0180) Microscopy : Microscopy

ToC Category:

Original Manuscript: March 14, 2007
Revised Manuscript: May 5, 2007
Manuscript Accepted: May 5, 2007
Published: May 15, 2007

Virtual Issues
Vol. 2, Iss. 6 Virtual Journal for Biomedical Optics

Yuliya Kuznetsova, Alexander Neumann, and S. R. Brueck, "Imaging interferometric microscopy–approaching the linear systems limits of optical resolution.," Opt. Express 15, 6651-6663 (2007)

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