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Virtual Journal for Biomedical Optics

Virtual Journal for Biomedical Optics

| EXPLORING THE INTERFACE OF LIGHT AND BIOMEDICINE

  • Editor: Gregory W. Faris
  • Vol. 3, Iss. 11 — Oct. 22, 2008

Single-pulse ultrafast-laser machining of high aspect nano-holes at the surface of SiO2

Yelena V. White, Xiaoxuan Li, Zbigniew Sikorski, Lloyd M. Davis, and William Hofmeister  »View Author Affiliations


Optics Express, Vol. 16, Issue 19, pp. 14411-14420 (2008)
http://dx.doi.org/10.1364/OE.16.014411


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Abstract

Use of high numerical aperture focusing with negative longitudinal spherical aberration is shown to enable deep (>10 µm), high aspect ratio, nano-scale-width holes to be machined into the surface of a fused-silica (SiO2) substrate with single pulses from a 200 fs, 4 µJ Ti-Sapphire laser source. The depths of the nano-holes are characterized by use of a non-destructive acetate replication technique and are confirmed by imaging of sectioned samples with a dual focused ion beam/scanning electron microscope.

© 2008 Optical Society of America

OCIS Codes
(190.7110) Nonlinear optics : Ultrafast nonlinear optics
(220.1010) Optical design and fabrication : Aberrations (global)
(320.2250) Ultrafast optics : Femtosecond phenomena
(350.3390) Other areas of optics : Laser materials processing
(220.4241) Optical design and fabrication : Nanostructure fabrication

ToC Category:
Laser Micromachining

History
Original Manuscript: July 22, 2008
Revised Manuscript: August 22, 2008
Manuscript Accepted: August 24, 2008
Published: August 29, 2008

Virtual Issues
Vol. 3, Iss. 11 Virtual Journal for Biomedical Optics

Citation
Yelena V. White, Xiaoxuan Li, Zbigniew Sikorski, Lloyd M. Davis, and William Hofmeister, "Single-pulse ultrafast-laser machining of high aspect nano-holes at the surface of SiO2," Opt. Express 16, 14411-14420 (2008)
http://www.opticsinfobase.org/vjbo/abstract.cfm?URI=oe-16-19-14411


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