Ellipsometric retrieval of the phenomenological parameters of a waveguide grating

doi:10.1364/OE.17.018219

Ellipsometric retrieval of the phenomenological parameters of a waveguide grating

David Pietroy, Olivier Parriaux, and Jean-Louis Stehle »View Author Affiliations

Optics Express, Vol. 17, Issue 20, pp. 18219-18228 (2009)
http://dx.doi.org/10.1364/OE.17.018219

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Abstract
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Abstract

Ellipsometry gives access to the phenomenological parameters of a grating coupled slab waveguide structure and permits its functional modeling without a priori knowledge of the geometry of the structure. The evidence is shown by comparing with the exact electromagnetic modeling of a sliced cross-section of a singlemode grating waveguide biosensor chip cut by FIB and analyzed by SEM.

OCIS Codes
(050.2770) Diffraction and gratings : Gratings
(120.2130) Instrumentation, measurement, and metrology : Ellipsometry and polarimetry
(130.2790) Integrated optics : Guided waves
(230.7400) Optical devices : Waveguides, slab
(260.5740) Physical optics : Resonance

ToC Category:
Diffraction and Gratings

History
Original Manuscript: June 12, 2009
Revised Manuscript: July 24, 2009
Manuscript Accepted: July 25, 2009
Published: September 25, 2009

Virtual Issues
Vol. 4, Iss. 11 Virtual Journal for Biomedical Optics

Citation
David Pietroy, Olivier Parriaux, and Jean-Louis Stehle, "Ellipsometric retrieval of the phenomenological parameters of a waveguide grating," Opt. Express 17, 18219-18228 (2009)
http://www.opticsinfobase.org/vjbo/abstract.cfm?URI=oe-17-20-18219

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References

G. A. Golubenko, A. S. Svakhin, V. A. Sychugov, and A. V. Tishchenko, “Total reflection of light from a corrugated surface of a dielectric waveguide,” Sov. J. Quantum Electron. 15(7), 886–887 (1985). [CrossRef]
B. T. Cunningham, P. Li, B. Lin, and J. Pepper, “Colorimetric resonant reflection as a direct biochemical assay technique,” Sens. Actuators B Chem. 81(2-3), 316–328 (2002). [CrossRef]
Y. Fang, A. M. Ferrie, N. H. Fontaine, J. Mauro, and J. Balakrishnan, “Resonant waveguide grating biosensor for living cell sensing,” Biophys. J. 91(5), 1925–1940 (2006). [CrossRef] [PubMed]
N. M. Lyndin, V. A. Sychugov, A. V. Tishchenko, O. Parriaux, N. Athanassopoulou, P. Edwards, C. Maule, and J. Molloy, “Enhanced visibility grating waveguide biosensor,” in Proceedings of 5th European Conference on Optical Chemical Sensors and Biosensors EUROPT®ODE V, Lyon, France, ed. (Elsevier, 2000), p. 63.
B. A. Usievich, V. A. Sychugov, J. K. H. Nurligareev, and O. Parriaux, “Multilayer resonances sharpened by grating waveguide resonance,” Opt. Quantum Electron. 36(1-3), 109–117 (2004). [CrossRef]
T. Clausnitzer, A. V. Tishchenko, E.-B. Kley, H.-J. Fuchs, D. Schelle, O. Parriaux, and U. Kroll, “Narrowband, polarization-independent free-space wave notch filter,” J. Opt. Soc. Am. A 22(12), 2799–2803 (2005). [CrossRef]
I. Abdulhalim, “Optimized guided mode resonant structure as thermooptic sensor and liquid crystal tunable filter,” Chin. Opt. Lett. (to be published).
V. A. Sychugov and A. V. Tishchenko, “Ray optics philosophy in the problem of corrugated-waveguide-excitation with an external lightbeam,” Photon. Opto. 1, 79–89 (1993).
D. Pietroy, A. V. Tishchenko, M. Flury, and O. Parriaux, “Bridging pole and coupled wave formalisms for grating waveguide resonance analysis and design synthesis,” Opt. Express 15(15), 9832–9842 (2007). [CrossRef]
K. Vedam, “Non-destructive depth profiling of multilayer structures by spectroscopic ellipsometry,” Mater. Res. Soc. Bull. 12, 21–23 (1987).
M. Nevière, “The homogeneous problem,” in Electromagnetic Theory of Gratings, R. Petit, ed., (Springer Verlag Berlin, 1980), pp. 123–157.
D. Neuschäfer, W. Budach, Ch. Wanke, and S. D. Chibout, “Evanescent resonator chips: a universal platform with superior sensitivity for fluorescence-based microarrays,” Biosens. Bioelectron. 18(4), 489–497 (2003). [CrossRef] [PubMed]
W. Lukosz and K. Tiefenthaler, “Directional switching in planar waveguides effected by adsorption-desorption processes,” IEE Conf. Publ. 227, 152–155 (1983).
K. Schmitt, K. Oehse, G. Sulz, and C. Hoffmann, “Evanescent field sensors based on tantalum pentoxide waveguides – a review,” Sensors 8(2), 711–738 (2008). [CrossRef]
H. Mukundan, A. S. Anderson, W. K. Grace, K. M. Grace, N. Hartman, J. S. Martinez, and B. I. Swanson, “Waveguide-Based Biosensors for Pathogen Detection,” Sensors 9(7), 5783–5809 (2009). [CrossRef]
A. M. Popa, B. Wenger, E. Scolan, G. Voirin, H. Heinzelmann, and R. Pugin, “Nanostructured waveguides for evanescent wave biosensors,” Appl. Surf. Sci. (to be published).
B. H. Cheong, O. N. Prudnikov, E. Cho, H. S. Kim, J. Yu, Y. S. Cho, H. Y. Choi, and S. T. Shin, “High angular tolerant color filter using subwavelength gratings,” Appl. Phys. Lett. 94(21), 213104 (2009). [CrossRef]
N. Lyndin, “MC grating: diffraction grating analysis,” http://www.mcgrating.com .
http://www.sopra-sa.com/5-spectroscopic-ellipsometer-se-.php .
J. H. Liu, C. W. Liu, K. J. Huang, T. Y. Li, M. C. Chiu, J. J. Hong, C. Chung-Ping Chen, C. S. Jao, and L. Wang, “Efficient and accurate optical scatterometry diagnosis of grating variation based on segmented moment matching and singular value decomposition method,” Microelectron. Eng. 86(4-6), 999–1003 (2009). [CrossRef]

Abdulhalim, I.
Anderson, A. S.
Balakrishnan, J.
Budach, W.
Cheong, B. H.
Chibout, S. D.
Chiu, M. C.
Cho, E.
Cho, Y. S.
Choi, H. Y.
Chung-Ping Chen, C.
Clausnitzer, T.
Cunningham, B. T.
Fang, Y.
Ferrie, A. M.
Flury, M.
Fontaine, N. H.
Fuchs, H.-J.
Golubenko, G. A.
Grace, K. M.
Grace, W. K.
Hartman, N.
Heinzelmann, H.
Hoffmann, C.
Hong, J. J.
Huang, K. J.
Jao, C. S.
Kim, H. S.
Kley, E.-B.
Kroll, U.
Li, P.
Li, T. Y.
Lin, B.
Liu, C. W.
Liu, J. H.
Lukosz, W.
Martinez, J. S.
Mauro, J.
Mukundan, H.
Neuschäfer, D.
Nurligareev, J. K. H.
Oehse, K.
Parriaux, O.
Pepper, J.
Pietroy, D.
Popa, A. M.
Prudnikov, O. N.
Pugin, R.
Schelle, D.
Schmitt, K.
Scolan, E.
Shin, S. T.
Sulz, G.
Svakhin, A. S.
Swanson, B. I.
Sychugov, V. A.
Tiefenthaler, K.
Tishchenko, A. V.
Usievich, B. A.
Vedam, K.
Voirin, G.
Wang, L.
Wanke, Ch.
Wenger, B.
Yu, J.

Appl. Phys. Lett.

B. H. Cheong, O. N. Prudnikov, E. Cho, H. S. Kim, J. Yu, Y. S. Cho, H. Y. Choi, and S. T. Shin, “High angular tolerant color filter using subwavelength gratings,” Appl. Phys. Lett. 94(21), 213104 (2009). [CrossRef]

Appl. Surf. Sci.

A. M. Popa, B. Wenger, E. Scolan, G. Voirin, H. Heinzelmann, and R. Pugin, “Nanostructured waveguides for evanescent wave biosensors,” Appl. Surf. Sci. (to be published).

Biophys. J.

Y. Fang, A. M. Ferrie, N. H. Fontaine, J. Mauro, and J. Balakrishnan, “Resonant waveguide grating biosensor for living cell sensing,” Biophys. J. 91(5), 1925–1940 (2006). [CrossRef] [PubMed]

Biosens. Bioelectron.

D. Neuschäfer, W. Budach, Ch. Wanke, and S. D. Chibout, “Evanescent resonator chips: a universal platform with superior sensitivity for fluorescence-based microarrays,” Biosens. Bioelectron. 18(4), 489–497 (2003). [CrossRef] [PubMed]

Chin. Opt. Lett.

I. Abdulhalim, “Optimized guided mode resonant structure as thermooptic sensor and liquid crystal tunable filter,” Chin. Opt. Lett. (to be published).

IEE Conf. Publ.

W. Lukosz and K. Tiefenthaler, “Directional switching in planar waveguides effected by adsorption-desorption processes,” IEE Conf. Publ. 227, 152–155 (1983).

J. Opt. Soc. Am. A

T. Clausnitzer, A. V. Tishchenko, E.-B. Kley, H.-J. Fuchs, D. Schelle, O. Parriaux, and U. Kroll, “Narrowband, polarization-independent free-space wave notch filter,” J. Opt. Soc. Am. A 22(12), 2799–2803 (2005). [CrossRef]

Mater. Res. Soc. Bull.

K. Vedam, “Non-destructive depth profiling of multilayer structures by spectroscopic ellipsometry,” Mater. Res. Soc. Bull. 12, 21–23 (1987).

Microelectron. Eng.

J. H. Liu, C. W. Liu, K. J. Huang, T. Y. Li, M. C. Chiu, J. J. Hong, C. Chung-Ping Chen, C. S. Jao, and L. Wang, “Efficient and accurate optical scatterometry diagnosis of grating variation based on segmented moment matching and singular value decomposition method,” Microelectron. Eng. 86(4-6), 999–1003 (2009). [CrossRef]

Opt. Express

D. Pietroy, A. V. Tishchenko, M. Flury, and O. Parriaux, “Bridging pole and coupled wave formalisms for grating waveguide resonance analysis and design synthesis,” Opt. Express 15(15), 9832–9842 (2007). [CrossRef]

Opt. Quantum Electron.

B. A. Usievich, V. A. Sychugov, J. K. H. Nurligareev, and O. Parriaux, “Multilayer resonances sharpened by grating waveguide resonance,” Opt. Quantum Electron. 36(1-3), 109–117 (2004). [CrossRef]

Photon. Opto.

V. A. Sychugov and A. V. Tishchenko, “Ray optics philosophy in the problem of corrugated-waveguide-excitation with an external lightbeam,” Photon. Opto. 1, 79–89 (1993).

Sens. Actuators B Chem.

B. T. Cunningham, P. Li, B. Lin, and J. Pepper, “Colorimetric resonant reflection as a direct biochemical assay technique,” Sens. Actuators B Chem. 81(2-3), 316–328 (2002). [CrossRef]

Sensors

K. Schmitt, K. Oehse, G. Sulz, and C. Hoffmann, “Evanescent field sensors based on tantalum pentoxide waveguides – a review,” Sensors 8(2), 711–738 (2008). [CrossRef]
H. Mukundan, A. S. Anderson, W. K. Grace, K. M. Grace, N. Hartman, J. S. Martinez, and B. I. Swanson, “Waveguide-Based Biosensors for Pathogen Detection,” Sensors 9(7), 5783–5809 (2009). [CrossRef]

Sov. J. Quantum Electron.

G. A. Golubenko, A. S. Svakhin, V. A. Sychugov, and A. V. Tishchenko, “Total reflection of light from a corrugated surface of a dielectric waveguide,” Sov. J. Quantum Electron. 15(7), 886–887 (1985). [CrossRef]

Other

N. M. Lyndin, V. A. Sychugov, A. V. Tishchenko, O. Parriaux, N. Athanassopoulou, P. Edwards, C. Maule, and J. Molloy, “Enhanced visibility grating waveguide biosensor,” in Proceedings of 5th European Conference on Optical Chemical Sensors and Biosensors EUROPT®ODE V, Lyon, France, ed. (Elsevier, 2000), p. 63.
M. Nevière, “The homogeneous problem,” in Electromagnetic Theory of Gratings, R. Petit, ed., (Springer Verlag Berlin, 1980), pp. 123–157.
N. Lyndin, “MC grating: diffraction grating analysis,” http://www.mcgrating.com .
http://www.sopra-sa.com/5-spectroscopic-ellipsometer-se-.php .

2009, Mukundan, Sensors
2009, Cheong, Appl. Phys. Lett.
2009, Liu, Microelectron. Eng.
2008, Schmitt, Sensors
2007, Pietroy, Opt. Express
2006, Fang, Biophys. J.
2005, Clausnitzer, J. Opt. Soc. Am. A
2004, Usievich, Opt. Quantum Electron.
2003, Neuschäfer, Biosens. Bioelectron.
2002, Cunningham, Sens. Actuators B Chem.
1993, Sychugov, Photon. Opto.
1987, Vedam, Mater. Res. Soc. Bull.
1985, Golubenko, Sov. J. Quantum Electron.
1983, Lukosz, IEE Conf. Publ.

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[1] G. A. Golubenko, A. S. Svakhin, V. A. Sychugov, and A. V. Tishchenko, “Total reflection of light from a corrugated surface of a dielectric waveguide,” Sov. J. Quantum Electron. 15(7), 886–887 (1985). [CrossRef]

[2] B. T. Cunningham, P. Li, B. Lin, and J. Pepper, “Colorimetric resonant reflection as a direct biochemical assay technique,” Sens. Actuators B Chem. 81(2-3), 316–328 (2002). [CrossRef]

[3] Y. Fang, A. M. Ferrie, N. H. Fontaine, J. Mauro, and J. Balakrishnan, “Resonant waveguide grating biosensor for living cell sensing,” Biophys. J. 91(5), 1925–1940 (2006). [CrossRef] [PubMed]

[4] N. M. Lyndin, V. A. Sychugov, A. V. Tishchenko, O. Parriaux, N. Athanassopoulou, P. Edwards, C. Maule, and J. Molloy, “Enhanced visibility grating waveguide biosensor,” in Proceedings of 5th European Conference on Optical Chemical Sensors and Biosensors EUROPT®ODE V, Lyon, France, ed. (Elsevier, 2000), p. 63.

[5] B. A. Usievich, V. A. Sychugov, J. K. H. Nurligareev, and O. Parriaux, “Multilayer resonances sharpened by grating waveguide resonance,” Opt. Quantum Electron. 36(1-3), 109–117 (2004). [CrossRef]

[6] T. Clausnitzer, A. V. Tishchenko, E.-B. Kley, H.-J. Fuchs, D. Schelle, O. Parriaux, and U. Kroll, “Narrowband, polarization-independent free-space wave notch filter,” J. Opt. Soc. Am. A 22(12), 2799–2803 (2005). [CrossRef]

[7] I. Abdulhalim, “Optimized guided mode resonant structure as thermooptic sensor and liquid crystal tunable filter,” Chin. Opt. Lett. (to be published).

[8] V. A. Sychugov and A. V. Tishchenko, “Ray optics philosophy in the problem of corrugated-waveguide-excitation with an external lightbeam,” Photon. Opto. 1, 79–89 (1993).

[9] D. Pietroy, A. V. Tishchenko, M. Flury, and O. Parriaux, “Bridging pole and coupled wave formalisms for grating waveguide resonance analysis and design synthesis,” Opt. Express 15(15), 9832–9842 (2007). [CrossRef]

[10] K. Vedam, “Non-destructive depth profiling of multilayer structures by spectroscopic ellipsometry,” Mater. Res. Soc. Bull. 12, 21–23 (1987).

[11] M. Nevière, “The homogeneous problem,” in Electromagnetic Theory of Gratings, R. Petit, ed., (Springer Verlag Berlin, 1980), pp. 123–157.

[12] D. Neuschäfer, W. Budach, Ch. Wanke, and S. D. Chibout, “Evanescent resonator chips: a universal platform with superior sensitivity for fluorescence-based microarrays,” Biosens. Bioelectron. 18(4), 489–497 (2003). [CrossRef] [PubMed]

[13] W. Lukosz and K. Tiefenthaler, “Directional switching in planar waveguides effected by adsorption-desorption processes,” IEE Conf. Publ. 227, 152–155 (1983).

[14] K. Schmitt, K. Oehse, G. Sulz, and C. Hoffmann, “Evanescent field sensors based on tantalum pentoxide waveguides – a review,” Sensors 8(2), 711–738 (2008). [CrossRef]

[15] H. Mukundan, A. S. Anderson, W. K. Grace, K. M. Grace, N. Hartman, J. S. Martinez, and B. I. Swanson, “Waveguide-Based Biosensors for Pathogen Detection,” Sensors 9(7), 5783–5809 (2009). [CrossRef]

[16] A. M. Popa, B. Wenger, E. Scolan, G. Voirin, H. Heinzelmann, and R. Pugin, “Nanostructured waveguides for evanescent wave biosensors,” Appl. Surf. Sci. (to be published).

[17] B. H. Cheong, O. N. Prudnikov, E. Cho, H. S. Kim, J. Yu, Y. S. Cho, H. Y. Choi, and S. T. Shin, “High angular tolerant color filter using subwavelength gratings,” Appl. Phys. Lett. 94(21), 213104 (2009). [CrossRef]

[18] N. Lyndin, “MC grating: diffraction grating analysis,” http://www.mcgrating.com .

[19] http://www.sopra-sa.com/5-spectroscopic-ellipsometer-se-.php .

[20] J. H. Liu, C. W. Liu, K. J. Huang, T. Y. Li, M. C. Chiu, J. J. Hong, C. Chung-Ping Chen, C. S. Jao, and L. Wang, “Efficient and accurate optical scatterometry diagnosis of grating variation based on segmented moment matching and singular value decomposition method,” Microelectron. Eng. 86(4-6), 999–1003 (2009). [CrossRef]

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Ellipsometric retrieval of the phenomenological parameters of a waveguide grating