Silicon-on-insulator guided mode resonant grating for evanescent field molecular sensing

doi:10.1364/OE.17.018371

Silicon-on-insulator guided mode resonant grating for evanescent field molecular sensing

J. H. Schmid, W. Sinclair, J. García, S. Janz, J. Lapointe, D. Poitras, Y. Li, T. Mischki, G. Lopinski, P. Cheben, A. Delâge, A. Densmore, P. Waldron, and D.-X. Xu »View Author Affiliations

Optics Express, Vol. 17, Issue 20, pp. 18371-18380 (2009)
http://dx.doi.org/10.1364/OE.17.018371

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Abstract

We present experimental and theoretical results of label-free molecular sensing using the transverse magnetic mode of a 0.22 μm thick silicon slab waveguide with a surface grating implemented in a guided mode resonance configuration. Due to the strong overlap of the evanescent field of the waveguide mode with a molecular layer attached to the surface, these sensors exhibit high sensitivity, while their fabrication and packaging requirements are modest. Experimentally, we demonstrate a resonance wavelength shift of ~1 nm when a monolayer of the protein streptavidin is attached to the surface, in good agreement with calculations based on rigorous coupled wave analysis. In our current optical setup this shift corresponds to an estimated limit of detection of 0.2% of a monolayer of streptavidin.

OCIS Codes
(050.2770) Diffraction and gratings : Gratings
(130.3120) Integrated optics : Integrated optics devices
(130.6010) Integrated optics : Sensors
(230.5750) Optical devices : Resonators

ToC Category:
Integrated Optics

History
Original Manuscript: August 19, 2009
Revised Manuscript: September 20, 2009
Manuscript Accepted: September 20, 2009
Published: September 25, 2009

Virtual Issues
Vol. 4, Iss. 11 Virtual Journal for Biomedical Optics

Citation
J. H. Schmid, W. Sinclair, J. García, S. Janz, J. Lapointe, D. Poitras, Y. Li, T. Mischki, G. Lopinski, P. Cheben, A. Delâge, A. Densmore, P. Waldron, and D.-X. Xu, "Silicon-on-insulator guided mode resonant grating for evanescent field molecular sensing," Opt. Express 17, 18371-18380 (2009)
http://www.opticsinfobase.org/vjbo/abstract.cfm?URI=oe-17-20-18371

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References

J. Homola, S. S. Yee, and G. Gauglitz, “Surface plasmon resonance sensors: review,” Sens. Act. B 54(1), 3–15 (1999). [CrossRef]
A. Densmore, D.-X. Xu, S. Janz, P. Waldron, T. Mischki, G. Lopinski, A. Delâge, J. Lapointe, P. Cheben, B. Lamontagne, and J. H. Schmid, “Spiral-path high-sensitivity silicon photonic wire molecular sensor with temperature-independent response,” Opt. Lett. 33(6), 596–598 (2008). [CrossRef] [PubMed]
D.-X. Xu, A. Densmore, A. Delâge, P. Waldron, R. McKinnon, S. Janz, J. Lapointe, G. Lopinski, T. Mischki, E. Post, P. Cheben, and J. H. Schmid, “Folded cavity SOI microring sensors for high sensitivity and real time measurement of biomolecular binding,” Opt. Express 16(19), 15137–15148 (2008). [CrossRef] [PubMed]
A. Densmore, D.-X. Xu, P. Waldron, S. Janz, P. Cheben, J. Lapointe, A. Delâge, B. Lamontagne, J. H. Schmid, and E. Post, “A silicon-on-insulator photonic wire based evanescent field sensor,” IEEE Photon. Technol. Lett. 18(23), 2520–2522 (2006). [CrossRef]
S. S. Wang, R. Magnusson, J. S. Bagby, and M. G. Moharam, “Guided mode resonances in planar dielectric-layer diffraction gratings,” J. Opt. Soc. Am. A 7(8), 1470–1474 (1990). [CrossRef]
J. J. Wang, L. Chen, S. Kwan, F. Liu, and X. Deng, “Resonant grating filters as refractive index sensors for chemical and biological detections,” J. Vac. Sci. Technol. B 23(6), 3006–3010 (2005). [CrossRef]
The RODIS software package, developed by the Photonics Research Group at the University of Ghent, Belgium, is available for download from the website: http://www.photonics.intec.ugent.be/research/facilities/design/rodis/default.htm
M. G. Moharam and T. K. Gaylord, “Rigorous coupled-wave analysis of planar-grating diffraction,” J. Opt. Soc. Am. 71(7), 811–818 (1981). [CrossRef]
I. M. White and X. Fan, “On the performance quantification of resonant refractive index sensors,” Opt. Express 16(2), 1020–1028 (2008). [CrossRef] [PubMed]
J. Hu, X. Sun, A. Agarwal, and L. C. Kimerling, “Design guidelines for optical resonator biochemical sensors,” J. Opt. Soc. Am. B 26(5), 1032–1041 (2009). [CrossRef]
D. W. Peters, S. A. Kemme, and G. R. Hadley, “Effect of finite grating, waveguide width, and end-facet geometry on resonant subwavelength grating reflectivity,” J. Opt. Soc. Am. A 21(6), 981–987 (2004). [CrossRef]
K. De Vos, I. Bartolozzi, E. Schacht, P. Bienstman, and R. Baets, “Silicon-on-Insulator microring resonator for sensitive and label-free biosensing,” Opt. Express 15(12), 7610–7615 (2007). [CrossRef] [PubMed]
A. Delâge, D.-X. Xu, R. W. McKinnon, E. Post, P. Waldron, J. Lapointe, C. Storey, A. Densmore, S. Janz, B. Lamontagne, P. Cheben, and J. H. Schmid, “Wavelength-dependent model of ring resonator sensor excited by a directional coupler,” J. Lightwave Technol. 27(9), 1172–1180 (2009). [CrossRef]
J. Heebner, R. Grover, and T. Ibrahim, “Optical microresonators: theory, fabrication, and applications,” Springer Series in Optical Sciences 138, Springer, New York (2008).

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[1] J. Homola, S. S. Yee, and G. Gauglitz, “Surface plasmon resonance sensors: review,” Sens. Act. B 54(1), 3–15 (1999). [CrossRef]

[2] A. Densmore, D.-X. Xu, S. Janz, P. Waldron, T. Mischki, G. Lopinski, A. Delâge, J. Lapointe, P. Cheben, B. Lamontagne, and J. H. Schmid, “Spiral-path high-sensitivity silicon photonic wire molecular sensor with temperature-independent response,” Opt. Lett. 33(6), 596–598 (2008). [CrossRef] [PubMed]

[3] D.-X. Xu, A. Densmore, A. Delâge, P. Waldron, R. McKinnon, S. Janz, J. Lapointe, G. Lopinski, T. Mischki, E. Post, P. Cheben, and J. H. Schmid, “Folded cavity SOI microring sensors for high sensitivity and real time measurement of biomolecular binding,” Opt. Express 16(19), 15137–15148 (2008). [CrossRef] [PubMed]

[4] A. Densmore, D.-X. Xu, P. Waldron, S. Janz, P. Cheben, J. Lapointe, A. Delâge, B. Lamontagne, J. H. Schmid, and E. Post, “A silicon-on-insulator photonic wire based evanescent field sensor,” IEEE Photon. Technol. Lett. 18(23), 2520–2522 (2006). [CrossRef]

[5] S. S. Wang, R. Magnusson, J. S. Bagby, and M. G. Moharam, “Guided mode resonances in planar dielectric-layer diffraction gratings,” J. Opt. Soc. Am. A 7(8), 1470–1474 (1990). [CrossRef]

[6] J. J. Wang, L. Chen, S. Kwan, F. Liu, and X. Deng, “Resonant grating filters as refractive index sensors for chemical and biological detections,” J. Vac. Sci. Technol. B 23(6), 3006–3010 (2005). [CrossRef]

[7] The RODIS software package, developed by the Photonics Research Group at the University of Ghent, Belgium, is available for download from the website: http://www.photonics.intec.ugent.be/research/facilities/design/rodis/default.htm

[8] M. G. Moharam and T. K. Gaylord, “Rigorous coupled-wave analysis of planar-grating diffraction,” J. Opt. Soc. Am. 71(7), 811–818 (1981). [CrossRef]

[9] I. M. White and X. Fan, “On the performance quantification of resonant refractive index sensors,” Opt. Express 16(2), 1020–1028 (2008). [CrossRef] [PubMed]

[10] J. Hu, X. Sun, A. Agarwal, and L. C. Kimerling, “Design guidelines for optical resonator biochemical sensors,” J. Opt. Soc. Am. B 26(5), 1032–1041 (2009). [CrossRef]

[11] D. W. Peters, S. A. Kemme, and G. R. Hadley, “Effect of finite grating, waveguide width, and end-facet geometry on resonant subwavelength grating reflectivity,” J. Opt. Soc. Am. A 21(6), 981–987 (2004). [CrossRef]

[12] K. De Vos, I. Bartolozzi, E. Schacht, P. Bienstman, and R. Baets, “Silicon-on-Insulator microring resonator for sensitive and label-free biosensing,” Opt. Express 15(12), 7610–7615 (2007). [CrossRef] [PubMed]

[13] A. Delâge, D.-X. Xu, R. W. McKinnon, E. Post, P. Waldron, J. Lapointe, C. Storey, A. Densmore, S. Janz, B. Lamontagne, P. Cheben, and J. H. Schmid, “Wavelength-dependent model of ring resonator sensor excited by a directional coupler,” J. Lightwave Technol. 27(9), 1172–1180 (2009). [CrossRef]

[14] J. Heebner, R. Grover, and T. Ibrahim, “Optical microresonators: theory, fabrication, and applications,” Springer Series in Optical Sciences 138, Springer, New York (2008).

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Silicon-on-insulator guided mode resonant grating for evanescent field molecular sensing