Thin film Ag superlens towards lab-on-a-chip integration

doi:10.1364/OE.17.022543

Thin film Ag superlens towards lab-on-a-chip integration

C. Jeppesen, R. B. Nielsen, A. Boltasseva, S. Xiao, N. A. Mortensen, and A. Kristensen »View Author Affiliations

Optics Express, Vol. 17, Issue 25, pp. 22543-22552 (2009)
http://dx.doi.org/10.1364/OE.17.022543

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Abstract

A thin metal film near-field superlens, as originally suggested by Pendry and realized by Fang et al. and Melville et al., is investigated with emphasis on materials suitable for integration on a lab-on-a-chip platform. A chemically resistant cyclo-olefin copolymer (COC), mr-I-T85 from microresist technology, is applied as dielectric matrix/spacer for an Ag thin film superlens. The superlens successfully resolves 80 nm half-pitch gratings when illuminated with UV radiation at a free space wavelength of 365 nm. The superlens design, fabrication and characterization is discussed.

OCIS Codes
(220.0220) Optical design and fabrication : Optical design and fabrication
(220.4241) Optical design and fabrication : Nanostructure fabrication
(250.5403) Optoelectronics : Plasmonics

ToC Category:
Metamaterials

History
Original Manuscript: September 21, 2009
Revised Manuscript: November 21, 2009
Manuscript Accepted: November 23, 2009
Published: November 24, 2009

Virtual Issues
Vol. 5, Iss. 1 Virtual Journal for Biomedical Optics

Citation
C. Jeppesen, R. B. Nielsen, A. Boltasseva, S. Xiao, N. A. Mortensen, and A. Kristensen, "Thin film Ag superlens towards lab-on-a-chip integration," Opt. Express 17, 22543-22552 (2009)
http://www.opticsinfobase.org/vjbo/abstract.cfm?URI=oe-17-25-22543

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References

J. B. Pendry and D. R. Smith, "Reversing light with negative refraction," Phys. Today 57, 37 - 43 (2004). [CrossRef]
J. B. Pendry, "Negative refraction makes a perfect lens," Phys. Rev. Lett. 85, 3966 - 3969 (2000). [CrossRef] [PubMed]
N. Fang, H. Lee, C. Sun, and X. Zhang, "Sub-diffraction-limited optical imaging with a silver superlens," Science 308, 534 - 537 (2005). [CrossRef] [PubMed]
D. O. S. Melville and R. J. Blaikie, "Super-resolution imaging through a planar silver layer," Opt. Express 13, 2127 - 2134 (2005). [CrossRef] [PubMed]
V. M. Shalaev and M. I. Stockman, "Optical properties of fractal clusters (susceptibility, surface enhanced Raman scattering by impurities)," Sov. Phys. JETP 65, 509-522 (1987).
Z. T. Liu, M. D. Thoreson, A. V. Kildishev, and V. M. Shalaev, "Translation of nanoantenna hot spots by a metal-dielectric composite superlens," Appl. Phys. Lett. 95, 033114 (2009). [CrossRef]
R. Holt and T. Cotton, "Surface-enhanced resonance Raman and electrochemical investigation of Glucose oxidase catalysis at a silver electrode," J. Am. Chem. Soc. 111, 2815-2821 (1989). [CrossRef]
M. Yang, F. Chung, and M. Thompson, "Acoustic network analysis as a novel technique for studying protein adsorption and denaturation at surfaces," Anal. Chem. 65, 3713-3716 (1993). [CrossRef]
K. Brown, A. Fox, and M. Natan, "Morphology-dependent electrochemistry of cytochrome c at Au colloidmodified SnO2 electrodes," J. Am. Chem. Soc. 118, 1154-1157 (1996). [CrossRef]
T. A. P. GmbH, "TOPAS Advanced Polymers," www.topas.com (2009).
R. R. Lamonte and D. McNally, "Uses and processing of cyclic olefin copolymers," Plast. Eng. 56, 51-55 (2000).
O. Gustafsson, K. B. Mogensen, and J. P. Kutter, "Underivatized cyclic olefin copolymer as substrate material and stationary phase for capillary and microchip electrochromatography," Electrophoresis 29 (2008). [CrossRef] [PubMed]
M. J. Weber, Handbook of optical materials (CRC Press, Boca Raton, 2003).
M. Scholer and R. J. Blaikie, "Simulations of surface roughness effects in planar superlenses," J. Opt. A: Pure Appl. Opt. 11, 105503 (2009). [CrossRef]
H. Lee, Y. Xiong, N. Fang,W. Srituravanich, S. Durant, M. Ambati, C. Sun, and X. Zhang, "Realization of optical superlens imaging below the diffraction limit," New J. Phys. 7, 255 (2005). [CrossRef]
P. Chaturvedi, K. Hsu, S. Zhang, and N. Fang, "New frontiers of metamaterials: design and fabrication," MRS Bull. 33, 915 - 920 (2008). [CrossRef]
L. Vj, N. P. Kobayashi, M. S. Islam, W. Wu, P. Chaturvedi, N. X. Fang, S. Y. Wang, and R. S. Williams, "Ultrasmooth Silver Thin Films Deposited with a Germanium Nucleation Layer," Nano Lett. 9, 178-182 (2009). [CrossRef]

Ambati, M.
Blaikie, R. J.
Brown, K.
Chaturvedi, P.
Chung, F.
Cotton, T.
Durant, S.
Fang, N.
Fang, N. X.
Fox, A.
Gustafsson, O.
Holt, R.
Hsu, K.
Islam, M. S.
Kildishev, A. V.
Kobayashi, N. P.
Kutter, J. P.
Lamonte, R. R.
Lee, H.
Liu, Z. T.
McNally, D.
Melville, D. O. S.
Mogensen, K. B.
Natan, M.
Pendry, J. B.
Scholer, M.
Shalaev, V. M.
Smith, D. R.
Srituravanich, W.
Stockman, M. I.
Sun, C.
Thompson, M.
Thoreson, M. D.
Vj, L.
Wang, S. Y.
Williams, R. S.
Wu, W.
Xiong, Y.
Yang, M.
Zhang, S.
Zhang, X.

Anal. Chem.

M. Yang, F. Chung, and M. Thompson, "Acoustic network analysis as a novel technique for studying protein adsorption and denaturation at surfaces," Anal. Chem. 65, 3713-3716 (1993). [CrossRef]

Appl. Phys. Lett.

Z. T. Liu, M. D. Thoreson, A. V. Kildishev, and V. M. Shalaev, "Translation of nanoantenna hot spots by a metal-dielectric composite superlens," Appl. Phys. Lett. 95, 033114 (2009). [CrossRef]

Electrophoresis

O. Gustafsson, K. B. Mogensen, and J. P. Kutter, "Underivatized cyclic olefin copolymer as substrate material and stationary phase for capillary and microchip electrochromatography," Electrophoresis 29 (2008). [CrossRef] [PubMed]

J. Am. Chem. Soc.

R. Holt and T. Cotton, "Surface-enhanced resonance Raman and electrochemical investigation of Glucose oxidase catalysis at a silver electrode," J. Am. Chem. Soc. 111, 2815-2821 (1989). [CrossRef]
K. Brown, A. Fox, and M. Natan, "Morphology-dependent electrochemistry of cytochrome c at Au colloidmodified SnO2 electrodes," J. Am. Chem. Soc. 118, 1154-1157 (1996). [CrossRef]

J. Opt. A: Pure Appl. Opt.

M. Scholer and R. J. Blaikie, "Simulations of surface roughness effects in planar superlenses," J. Opt. A: Pure Appl. Opt. 11, 105503 (2009). [CrossRef]

MRS Bull.

P. Chaturvedi, K. Hsu, S. Zhang, and N. Fang, "New frontiers of metamaterials: design and fabrication," MRS Bull. 33, 915 - 920 (2008). [CrossRef]

Nano Lett.

L. Vj, N. P. Kobayashi, M. S. Islam, W. Wu, P. Chaturvedi, N. X. Fang, S. Y. Wang, and R. S. Williams, "Ultrasmooth Silver Thin Films Deposited with a Germanium Nucleation Layer," Nano Lett. 9, 178-182 (2009). [CrossRef]

New J. Phys.

H. Lee, Y. Xiong, N. Fang,W. Srituravanich, S. Durant, M. Ambati, C. Sun, and X. Zhang, "Realization of optical superlens imaging below the diffraction limit," New J. Phys. 7, 255 (2005). [CrossRef]

Opt. Express

D. O. S. Melville and R. J. Blaikie, "Super-resolution imaging through a planar silver layer," Opt. Express 13, 2127 - 2134 (2005). [CrossRef] [PubMed]

Phys. Rev. Lett.

J. B. Pendry, "Negative refraction makes a perfect lens," Phys. Rev. Lett. 85, 3966 - 3969 (2000). [CrossRef] [PubMed]

Phys. Today

J. B. Pendry and D. R. Smith, "Reversing light with negative refraction," Phys. Today 57, 37 - 43 (2004). [CrossRef]

Plast. Eng.

R. R. Lamonte and D. McNally, "Uses and processing of cyclic olefin copolymers," Plast. Eng. 56, 51-55 (2000).

Science

N. Fang, H. Lee, C. Sun, and X. Zhang, "Sub-diffraction-limited optical imaging with a silver superlens," Science 308, 534 - 537 (2005). [CrossRef] [PubMed]

Sov. Phys. JETP

V. M. Shalaev and M. I. Stockman, "Optical properties of fractal clusters (susceptibility, surface enhanced Raman scattering by impurities)," Sov. Phys. JETP 65, 509-522 (1987).

Other

T. A. P. GmbH, "TOPAS Advanced Polymers," www.topas.com (2009).
M. J. Weber, Handbook of optical materials (CRC Press, Boca Raton, 2003).

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[1] J. B. Pendry and D. R. Smith, "Reversing light with negative refraction," Phys. Today 57, 37 - 43 (2004). [CrossRef]

[2] J. B. Pendry, "Negative refraction makes a perfect lens," Phys. Rev. Lett. 85, 3966 - 3969 (2000). [CrossRef] [PubMed]

[3] N. Fang, H. Lee, C. Sun, and X. Zhang, "Sub-diffraction-limited optical imaging with a silver superlens," Science 308, 534 - 537 (2005). [CrossRef] [PubMed]

[4] D. O. S. Melville and R. J. Blaikie, "Super-resolution imaging through a planar silver layer," Opt. Express 13, 2127 - 2134 (2005). [CrossRef] [PubMed]

[5] V. M. Shalaev and M. I. Stockman, "Optical properties of fractal clusters (susceptibility, surface enhanced Raman scattering by impurities)," Sov. Phys. JETP 65, 509-522 (1987).

[6] Z. T. Liu, M. D. Thoreson, A. V. Kildishev, and V. M. Shalaev, "Translation of nanoantenna hot spots by a metal-dielectric composite superlens," Appl. Phys. Lett. 95, 033114 (2009). [CrossRef]

[7] R. Holt and T. Cotton, "Surface-enhanced resonance Raman and electrochemical investigation of Glucose oxidase catalysis at a silver electrode," J. Am. Chem. Soc. 111, 2815-2821 (1989). [CrossRef]

[8] M. Yang, F. Chung, and M. Thompson, "Acoustic network analysis as a novel technique for studying protein adsorption and denaturation at surfaces," Anal. Chem. 65, 3713-3716 (1993). [CrossRef]

[9] K. Brown, A. Fox, and M. Natan, "Morphology-dependent electrochemistry of cytochrome c at Au colloidmodified SnO2 electrodes," J. Am. Chem. Soc. 118, 1154-1157 (1996). [CrossRef]

[10] T. A. P. GmbH, "TOPAS Advanced Polymers," www.topas.com (2009).

[11] R. R. Lamonte and D. McNally, "Uses and processing of cyclic olefin copolymers," Plast. Eng. 56, 51-55 (2000).

[12] O. Gustafsson, K. B. Mogensen, and J. P. Kutter, "Underivatized cyclic olefin copolymer as substrate material and stationary phase for capillary and microchip electrochromatography," Electrophoresis 29 (2008). [CrossRef] [PubMed]

[13] M. J. Weber, Handbook of optical materials (CRC Press, Boca Raton, 2003).

[14] M. Scholer and R. J. Blaikie, "Simulations of surface roughness effects in planar superlenses," J. Opt. A: Pure Appl. Opt. 11, 105503 (2009). [CrossRef]

[15] H. Lee, Y. Xiong, N. Fang,W. Srituravanich, S. Durant, M. Ambati, C. Sun, and X. Zhang, "Realization of optical superlens imaging below the diffraction limit," New J. Phys. 7, 255 (2005). [CrossRef]

[16] P. Chaturvedi, K. Hsu, S. Zhang, and N. Fang, "New frontiers of metamaterials: design and fabrication," MRS Bull. 33, 915 - 920 (2008). [CrossRef]

[17] L. Vj, N. P. Kobayashi, M. S. Islam, W. Wu, P. Chaturvedi, N. X. Fang, S. Y. Wang, and R. S. Williams, "Ultrasmooth Silver Thin Films Deposited with a Germanium Nucleation Layer," Nano Lett. 9, 178-182 (2009). [CrossRef]

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Thin film Ag superlens towards lab-on-a-chip integration