A study on the realization of high resolution solid immersion lens-based near-field imaging optics by use of an annular aperture

doi:10.1364/OE.18.017533

A study on the realization of high resolution solid immersion lens-based near-field imaging optics by use of an annular aperture

Hyungbae Moon, Yong-Joong Yoon, Wan-Chin Kim, No-Cheol Park, Kyoung-Su Park, and Young-Pil Park »View Author Affiliations

Optics Express, Vol. 18, Issue 16, pp. 17533-17541 (2010)
http://dx.doi.org/10.1364/OE.18.017533

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Abstract

We report on the realization of solid immersion lens (SIL)-based near-field (NF) optics with an annular aperture, which is targeted to achieve high optical resolution. A numerical aperture (NA) = 1.84 hemisphere SIL-optics with an annular aperture achieves higher optical resolution than the conventional NA = 2.0 SIL-optics. The designed aperture is fabricated by photo-lithography and dry-etching technique. Experimental verification of the designed optics was performed through beam spot profile measurement under NF imaging conditions. A 15% smaller full-width-at-half-maximum spot diameter is obtained by the aperture. We verified that this method gives an improvement of the resolution in the optical imaging systems requiring higher resolution.

OCIS Codes
(110.1220) Imaging systems : Apertures
(110.2990) Imaging systems : Image formation theory
(260.1960) Physical optics : Diffraction theory
(180.4243) Microscopy : Near-field microscopy
(210.4245) Optical data storage : Near-field optical recording

ToC Category:
Imaging Systems

History
Original Manuscript: June 10, 2010
Revised Manuscript: July 23, 2010
Manuscript Accepted: July 26, 2010
Published: July 30, 2010

Virtual Issues
Vol. 5, Iss. 12 Virtual Journal for Biomedical Optics

Citation
Hyungbae Moon, Yong-Joong Yoon, Wan-Chin Kim, No-Cheol Park, Kyoung-Su Park, and Young-Pil Park, "A study on the realization of high resolution solid immersion lens-based near-field imaging optics by use of an annular aperture," Opt. Express 18, 17533-17541 (2010)
http://www.opticsinfobase.org/vjbo/abstract.cfm?URI=oe-18-16-17533

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References

I. Ichimura, S. Hayashi, and G. S. Kino, “High-density optical recording using a solid immersion lens,” Appl. Opt. 36(19), 4339–4348 (1997). [CrossRef] [PubMed]
M. Shinoda, K. Saito, T. Kondo, M. Furuki, M. Takeda, A. Nakaoki, M. Sasaura, and K. Fujiura, “High-Density Near-Field Readout Using Solid Immersion Lens Made of KTaO3 Monocrystal,” Jpn. J. Appl. Phys. 45(No. 2B), 1332–1335 (2006). [CrossRef]
C. A. Verschuren, D. M. Bruls, B. Yin, J. M. A. van den Eerenbeemd, and F. Zijp, “High-Density Near-Field Recording on Cover-Layer Protected Discs Using an Actuated 1.45 Numerical Aperture Solid Immersion Lens in a Robust and Practical System,” Jpn. J. Appl. Phys. 46(No. 6B), 3889–3893 (2007). [CrossRef]
J. M. A. van den Eerenbeemd, D. M. Bruls, C. A. Verschuren, B. Yin, and F. Zijp, “Towards a Multi-Layer Near-Field Recording System: Dual-Layer Recording Results,” Jpn. J. Appl. Phys. 46(No. 6B), 3894–3897 (2007). [CrossRef]
Y. J. Yoon, C. K. Min, W. C. Kim, N. C. Park, Y. P. Park, T. Hong, and K. Lee, “Solid Immersion Lens Optical Head for High-Numerical-Aperture Cover-Layered Incident Near-Field Recording,” Jpn. J. Appl. Phys. 48(3), 03A040 (2009). [CrossRef]
M. Shinoda, K. Saito, T. Kondo, A. Nakaoki, M. Furuki, M. Takeda, M. Yamamoto, T. J. Schaich, B. M. van Oerle, H. P. Godfried, P. A. C. Kriele, E. P. Houwman, W. H. M. Nelissen, G. J. Pels, and P. G. M. Spaaij, “High-Density Near-Field Readout Using Diamond Solid Immersion Lens,” Jpn. J. Appl. Phys. 45(No. 2B), 1311–1313 (2006). [CrossRef]
T. Ishimoto, A. Nakaoki, K. Saito, T. Yamasaki, T. Yukumoto, S. Kim, T. Kondo, T. Mizukuki, O. Kawakubo, M. Honda, N. Shinohara, and N. Saito, “High-Density Recording with a Near-Field Optical Disk System Using a Medium with a Top Layer of High Refractive Index,” Jpn. J. Appl. Phys. 48(3), 03A015 (2009). [CrossRef]
H. Wang, L. Shi, B. Lukyanchuk, C. Sheppard, and C. T. Chong, “Creation of a needle of longitudinally polarized light in vacuum using binary optics,” Nat. Photonics 2(8), 501–505 (2008). [CrossRef]
H. Wang and F. Gan, “High focal depth with a pure-phase apodizer,” Appl. Opt. 40(31), 5658–5662 (2001). [CrossRef]
H. Wang and F. Gan, “Phase-shifting apodizers for increasing focal depth,” Appl. Opt. 41(25), 5263–5266 (2002). [CrossRef] [PubMed]
S. F. Pereira and A. S. van de Nes, “Superresolution by means of polarisation, phase and amplitude pupil masks,” Opt. Commun. 234(1-6), 119–124 (2004). [CrossRef]
C. Liu and S. H. Park, “Numerical analysis of an annular-aperture solid immersion lens,” Opt. Lett. 29(15), 1742–1744 (2004). [CrossRef] [PubMed]
Y. J. Zhang, H. C. Ciao, and C. W. Zheng, “Diffractive super-resolution elements applied to near-field optical data storage with solid immersion lens,” N. J. Phys. 6, 75–82 (2004). [CrossRef]
Y. J. Yoon, W. C. Kim, H. Choi, N. C. Park, and Y. P. Park, “Effect of Annular Aperture on Solid Immersion Lens-Based Near-Field Recording,” Jpn. J. Appl. Phys. 47(8), 6804–6808 (2008). [CrossRef]
Y. J. Yoon, W. C. Kim, K. S. Park, N. C. Park, and Y. P. Park, “Cover-layer-protected solid immersion lens-based near-field recording with an annular aperture,” J. Opt. Soc. Am. A 26(8), 1882–1888 (2009). [CrossRef]
Y. J. Yoon, W. C. Kim, N. C. Park, K. S. Park, and Y. P. Park, “Feasibility study of the application of radially polarized illumination to solid immersion lens-based near-field optics,” Opt. Lett. 34(13), 1961–1963 (2009). [CrossRef] [PubMed]
M. Shinoda, K. Saito, T. Ishimoto, T. Kondo, A. Nakaoki, N. Ide, M. Furuki, M. Takeda, Y. Akiyama, T. Shimouma, and M. Yamamoto, “High-Density Near-Field Optical Disc Recording,” Jpn. J. Appl. Phys. 44(No. 5B), 3537–3541 (2005). [CrossRef]
A. S. van de Nes, L. Billy, S. F. Pereira, and J. J. M. Braat, “Calculation of the vectorial field distribution in a stratified focal region of a high numerical aperture imaging system,” Opt. Express 12(7), 1281–1293 (2004). [CrossRef] [PubMed]
W. C. Kim, Y. J. Yoon, H. Choi, N. C. Park, and Y. P. Park, “Effects of optical variables in immersion lens-based near-field optics,” Opt. Express 16(18), 13933–13948 (2008). [CrossRef] [PubMed]
T. Song, H. D. Kwon, Y. J. Yoon, K. S. Jung, N. C. Park, and Y.-P. Park, “Aspherical Solid Immersion Lens of Integrated Optical Head for Near-Field Recording,” Jpn. J. Appl. Phys. 42(Part 1, No. 2B), 1082–1089 (2003). [CrossRef]
J. W. Smith, Modern Optical Engineering, 3rd ed. (McGraw-Hill, New York, 2001), Chap. 11.

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[1] I. Ichimura, S. Hayashi, and G. S. Kino, “High-density optical recording using a solid immersion lens,” Appl. Opt. 36(19), 4339–4348 (1997). [CrossRef] [PubMed]

[2] M. Shinoda, K. Saito, T. Kondo, M. Furuki, M. Takeda, A. Nakaoki, M. Sasaura, and K. Fujiura, “High-Density Near-Field Readout Using Solid Immersion Lens Made of KTaO3 Monocrystal,” Jpn. J. Appl. Phys. 45(No. 2B), 1332–1335 (2006). [CrossRef]

[3] C. A. Verschuren, D. M. Bruls, B. Yin, J. M. A. van den Eerenbeemd, and F. Zijp, “High-Density Near-Field Recording on Cover-Layer Protected Discs Using an Actuated 1.45 Numerical Aperture Solid Immersion Lens in a Robust and Practical System,” Jpn. J. Appl. Phys. 46(No. 6B), 3889–3893 (2007). [CrossRef]

[4] J. M. A. van den Eerenbeemd, D. M. Bruls, C. A. Verschuren, B. Yin, and F. Zijp, “Towards a Multi-Layer Near-Field Recording System: Dual-Layer Recording Results,” Jpn. J. Appl. Phys. 46(No. 6B), 3894–3897 (2007). [CrossRef]

[5] Y. J. Yoon, C. K. Min, W. C. Kim, N. C. Park, Y. P. Park, T. Hong, and K. Lee, “Solid Immersion Lens Optical Head for High-Numerical-Aperture Cover-Layered Incident Near-Field Recording,” Jpn. J. Appl. Phys. 48(3), 03A040 (2009). [CrossRef]

[6] M. Shinoda, K. Saito, T. Kondo, A. Nakaoki, M. Furuki, M. Takeda, M. Yamamoto, T. J. Schaich, B. M. van Oerle, H. P. Godfried, P. A. C. Kriele, E. P. Houwman, W. H. M. Nelissen, G. J. Pels, and P. G. M. Spaaij, “High-Density Near-Field Readout Using Diamond Solid Immersion Lens,” Jpn. J. Appl. Phys. 45(No. 2B), 1311–1313 (2006). [CrossRef]

[7] T. Ishimoto, A. Nakaoki, K. Saito, T. Yamasaki, T. Yukumoto, S. Kim, T. Kondo, T. Mizukuki, O. Kawakubo, M. Honda, N. Shinohara, and N. Saito, “High-Density Recording with a Near-Field Optical Disk System Using a Medium with a Top Layer of High Refractive Index,” Jpn. J. Appl. Phys. 48(3), 03A015 (2009). [CrossRef]

[8] H. Wang, L. Shi, B. Lukyanchuk, C. Sheppard, and C. T. Chong, “Creation of a needle of longitudinally polarized light in vacuum using binary optics,” Nat. Photonics 2(8), 501–505 (2008). [CrossRef]

[9] H. Wang and F. Gan, “High focal depth with a pure-phase apodizer,” Appl. Opt. 40(31), 5658–5662 (2001). [CrossRef]

[10] H. Wang and F. Gan, “Phase-shifting apodizers for increasing focal depth,” Appl. Opt. 41(25), 5263–5266 (2002). [CrossRef] [PubMed]

[11] S. F. Pereira and A. S. van de Nes, “Superresolution by means of polarisation, phase and amplitude pupil masks,” Opt. Commun. 234(1-6), 119–124 (2004). [CrossRef]

[12] C. Liu and S. H. Park, “Numerical analysis of an annular-aperture solid immersion lens,” Opt. Lett. 29(15), 1742–1744 (2004). [CrossRef] [PubMed]

[13] Y. J. Zhang, H. C. Ciao, and C. W. Zheng, “Diffractive super-resolution elements applied to near-field optical data storage with solid immersion lens,” N. J. Phys. 6, 75–82 (2004). [CrossRef]

[14] Y. J. Yoon, W. C. Kim, H. Choi, N. C. Park, and Y. P. Park, “Effect of Annular Aperture on Solid Immersion Lens-Based Near-Field Recording,” Jpn. J. Appl. Phys. 47(8), 6804–6808 (2008). [CrossRef]

[15] Y. J. Yoon, W. C. Kim, K. S. Park, N. C. Park, and Y. P. Park, “Cover-layer-protected solid immersion lens-based near-field recording with an annular aperture,” J. Opt. Soc. Am. A 26(8), 1882–1888 (2009). [CrossRef]

[16] Y. J. Yoon, W. C. Kim, N. C. Park, K. S. Park, and Y. P. Park, “Feasibility study of the application of radially polarized illumination to solid immersion lens-based near-field optics,” Opt. Lett. 34(13), 1961–1963 (2009). [CrossRef] [PubMed]

[17] M. Shinoda, K. Saito, T. Ishimoto, T. Kondo, A. Nakaoki, N. Ide, M. Furuki, M. Takeda, Y. Akiyama, T. Shimouma, and M. Yamamoto, “High-Density Near-Field Optical Disc Recording,” Jpn. J. Appl. Phys. 44(No. 5B), 3537–3541 (2005). [CrossRef]

[18] A. S. van de Nes, L. Billy, S. F. Pereira, and J. J. M. Braat, “Calculation of the vectorial field distribution in a stratified focal region of a high numerical aperture imaging system,” Opt. Express 12(7), 1281–1293 (2004). [CrossRef] [PubMed]

[19] W. C. Kim, Y. J. Yoon, H. Choi, N. C. Park, and Y. P. Park, “Effects of optical variables in immersion lens-based near-field optics,” Opt. Express 16(18), 13933–13948 (2008). [CrossRef] [PubMed]

[20] T. Song, H. D. Kwon, Y. J. Yoon, K. S. Jung, N. C. Park, and Y.-P. Park, “Aspherical Solid Immersion Lens of Integrated Optical Head for Near-Field Recording,” Jpn. J. Appl. Phys. 42(Part 1, No. 2B), 1082–1089 (2003). [CrossRef]

[21] J. W. Smith, Modern Optical Engineering, 3rd ed. (McGraw-Hill, New York, 2001), Chap. 11.

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A study on the realization of high resolution solid immersion lens-based near-field imaging optics by use of an annular aperture