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Virtual Journal for Biomedical Optics

Virtual Journal for Biomedical Optics

| EXPLORING THE INTERFACE OF LIGHT AND BIOMEDICINE

  • Editors: Andrew Dunn and Anthony Durkin
  • Vol. 5, Iss. 14 — Nov. 16, 2010

A new single-photon avalanche diode in 90nm standard CMOS technology

Mohammad Azim Karami, Marek Gersbach, Hyung-June Yoon, and Edoardo Charbon  »View Author Affiliations


Optics Express, Vol. 18, Issue 21, pp. 22158-22166 (2010)
http://dx.doi.org/10.1364/OE.18.022158


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Abstract

We report on the first implementation of a single-photon avalanche diode (SPAD) in 90nm complementary metal oxide semiconductor (CMOS) technology. The detector features an octagonal multiplication region and a guard ring to prevent premature edge breakdown using a standard mask set exclusively. The proposed structure emerged from a systematic study aimed at miniaturization, while optimizing overall performance. The guard ring design is the result of an extensive modeling effort aimed at constraining the multiplication region within a well-defined area where the electric field exceeds the critical value for impact ionization. The device exhibits a dark count rate of 8.1 kHz, a maximum photon detection probability of 9% and the jitter of 398ps at a wavelength of 637nm, all of them measured at room temperature and 0.13V of excess bias voltage. An afterpulsing probability of 32% is achieved at the nominal dead time. Applications include time-of-flight 3D vision, fluorescence lifetime imaging microscopy, fluorescence correlation spectroscopy, and time-resolved gamma/X-ray imaging. Standard characterization of the SPAD was performed in different bias voltages and temperatures.

© 2010 OSA

OCIS Codes
(000.2700) General : General science

ToC Category:
Detectors

History
Original Manuscript: August 31, 2010
Revised Manuscript: September 23, 2010
Manuscript Accepted: September 23, 2010
Published: October 5, 2010

Virtual Issues
Vol. 5, Iss. 14 Virtual Journal for Biomedical Optics

Citation
Mohammad Azim Karami, Marek Gersbach, Hyung-June Yoon, and Edoardo Charbon, "A new single-photon avalanche diode in 90nm standard CMOS technology," Opt. Express 18, 22158-22166 (2010)
http://www.opticsinfobase.org/vjbo/abstract.cfm?URI=oe-18-21-22158


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References

  1. S. Takeuchi, J. Kim, Y. Yamamoto, and H. H. Hogue, “Development of a high-quatum efficiency single-photon counting system,” Appl. Phys. Lett. 74(8), 1063–1065 (1999). [CrossRef]
  2. S. Cova, M. Ghioni, A. Lacaita, C. Samori, and F. Zappa, “Avalanche photodiodes and quenching circuits for single-photon detection,” Appl. Opt. 35(12), 1956–1976 (1996). [CrossRef] [PubMed]
  3. C. Niclass, A. Rochas, P. A. Besse, and E. Charbon, “Design and Characterization of a CMOS 3-D Image Sensor Based on Single Photon Avalanche Diodes,” J. Solid-State Circuits 40(9), 1847–1854 (2005). [CrossRef]
  4. C. Niclass, M. Sergio, and E. Charbon, “A single Photon Avalanche Diode Array Fabricated in 0.35µm CMOS and based on an Event-Driven Readout for TCSPC Experiments,” Proc. SPIE Optics East (2006).
  5. M. Gersbach, J. Richardson, E. Mazaleyart, S. Hardillier, C. Niclass, R. Henderson, L. Grant, and E. Charbon, “A low-noise single-photon detector implemented in a 130nm CMOS imaging process,” Solid-State Electron. 53(7), 803–808 (2009). [CrossRef]
  6. M. A. Karami, M. Gersbach, and E. Charbon, “A New Single-photon Avalanche Diode in 90nm Standard CMOS Technology”, SPIE Optics and Photonics, (2010).
  7. H. Finkelstein, M. J. Hsu, and S. C. Esener, “STI-Bounded Single-Photon Avalanche Diode in a Deep-Submicrometer CMOS Technology,” Electron. Device Lett. 27(11), 887–889 (2006). [CrossRef]
  8. C. Niclass, M. Gersbach, R. Henderson, L. Grant, and E. Charbon, “ A Single Photon Avalanche Diode Implemented in 130-nm CMOS Technology,” IEEE Sel. Top. Quantum, Electronics. 13(4), 863–869 (2007). [CrossRef]
  9. D. Stoppa, L. Pancheri, M. Scandiuzzio, L. Gonzo, G.-F. Dalla Betta, and A. Simoni, “A CMOS 3-D Imager Based on Single-Photon Avalanche Diode,” IEEE Trans. Circ. Syst. 54(1), 4–12 (2007). [CrossRef]
  10. A. Rochas, M. Gosch, A. Serov, P. A. Besse, R. S. Popovic, T. Lasser, and R. Rigler, “First Fully Integrated 2D-Array of Single Photon Detectors in Standard CMOS Technology,” IEEE. Photon. Tech, 15(7), 963–965 (2003). [CrossRef]
  11. H. Kwon, M. Kang, B. Park, J. Lee, and S. Park, “The Analysis of Dark Signals in CMOS APS Imagers from the Characterization of Test Structures,” IEEE Trans. Electron. Dev. 51(2), 178–184 (2004). [CrossRef]

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