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Thermal independent Silicon-Nitride slot waveguide biosensor with high sensitivityXiaoguang Tu, Junfeng Song, Tsung-Yang Liow, Mi Kyoung Park, Jessie Quah Yiying, Jack Sheng Kee, Mingbin Yu, and Guo-Qiang Lo »View Author Affiliations
Xiaoguang Tu,1,*
Junfeng Song,1,2
Tsung-Yang Liow,1
Mi Kyoung Park,1
Jessie Quah Yiying,1
Jack Sheng Kee,1
Mingbin Yu,1
and Guo-Qiang Lo1
1Institute of Microelectronics, A*STAR (Agency for Science, Technology and Research), 11 Science Park Road, Singapore Science Park II, 117685, Singapore 2State Key Laboratory on Integrated opto-electronics, College of Electronic Science and Engineering, Jilin University, Changchun, 130023 China *Corresponding author: tux@ime.a-star.edu.sg |
Optics Express, Vol. 20, Issue 3, pp. 2640-2648 (2012)
http://dx.doi.org/10.1364/OE.20.002640
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Abstract
As the sensitivity and detection limit of photonic refractive index (RI) biosensor increases, the temperature dependence becomes a major challenge. In this paper, we present a Mach-Zehnder Interferometer (MZI) biosensor based on silicon nitride slot waveguides. The biosensor is designed for minimal temperature dependence without compromising the performance in terms of sensitivity and detection limit. With air cladding, the measured surface sensitivity and detection limit of MZI biosensor reach 7.16 nm/ (ngmm−2) and 1.30 (pgmm−2), while achieving a low temperature dependence is 5.0 pm/o C. With water cladding, the measured bulk sensitivity and detection limit reach 1730(2π)/RIU and 1.29 × 10−5 RIU respectively. By utilizing Vernier effect through cascaded MZI structures, the measured sensitivity enhancement factor is 8.38, which results in a surface detection limit of 0.155 (pgmm−2).
© 2012 OSA
OCIS Codes
(130.3120) Integrated optics : Integrated optics devices
(130.6010) Integrated optics : Sensors
(230.3990) Optical devices : Micro-optical devices
(230.7370) Optical devices : Waveguides
ToC Category:
Sensors
History
Original Manuscript: October 25, 2011
Revised Manuscript: December 8, 2011
Manuscript Accepted: December 13, 2011
Published: January 20, 2012
Virtual Issues
Vol. 7, Iss. 3 Virtual Journal for Biomedical Optics
Citation
Xiaoguang Tu, Junfeng Song, Tsung-Yang Liow, Mi Kyoung Park, Jessie Quah Yiying, Jack Sheng Kee, Mingbin Yu, and Guo-Qiang Lo, "Thermal independent Silicon-Nitride slot waveguide biosensor with high sensitivity," Opt. Express 20, 2640-2648 (2012)
http://www.opticsinfobase.org/vjbo/abstract.cfm?URI=oe-20-3-2640
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References
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- B. Guha, A. Gondarenko, and M. Lipson, “Minimizing temperature sensitivity of silicon Mach-Zehnder interferometers,” Opt. Express18(3), 1879–1887 (2010). [CrossRef] [PubMed]
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- C. F. Carlborg, K. B. Gylfason, A. Kaźmierczak, F. Dortu, M. J. Bañuls Polo, A. Maquieira Catala, G. M. Kresbach, H. Sohlström, T. Moh, L. Vivien, J. Popplewell, G. Ronan, C. A. Barrios, G. Stemme, and W. van der Wijngaart, “A packaged optical slot-waveguide ring resonator sensor array for multiplex label-free assays in labs-on-chips,” Lab Chip10(3), 281–290 (2010). [CrossRef] [PubMed]
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- H. Su and X. G. Huang, “Fresnel-reflection-based fiber sensor for on-line measurement of solute concentration in solutions,” Sens. Actuators B Chem.126(2), 579–582 (2007). [CrossRef]
- M. Iqbal, M. A. Gleeson, B. Spaugh, F. Tybor, W. G. Gunn, M. Hochberg, T. B. Jones, R. C. Bailey, and L. C. Gunn, “Laber-Free biosensor arrays based on silicon ring resonators and high-speed optical scanning instrumentation,” IEEE J. Sel. Top. Quantum Electron.16(3), 654–661 (2010). [CrossRef]
- D.-X. Xu, M. Vachon, A. Densmore, R. Ma, A. Delâge, S. Janz, J. Lapointe, Y. Li, G. Lopinski, D. Zhang, Q. Y. Liu, P. Cheben, and J. H. Schmid, “Label-free biosensor array based on silicon-on-insulator ring resonators addressed using a WDM approach,” Opt. Lett.35(16), 2771–2773 (2010). [CrossRef] [PubMed]
- D. X. Xu, M. Vachon, A. Densmore, R. Ma, S. Janz, A. Delâge, J. Lapointe, P. Cheben, J. H. Schmid, E. Post, S. Messaoudène, and J. M. Fédéli, “Real-time cancellation of temperature induced resonance shifts in SOI wire waveguide ring resonator label-free biosensor arrays,” Opt. Express18(22), 22867–22879 (2010). [CrossRef] [PubMed]
- A. Densmore, M. Vachon, D. X. Xu, S. Janz, R. Ma, Y. H. Li, G. Lopinski, A. Delâge, J. Lapointe, C. C. Luebbert, Q. Y. Liu, P. Cheben, and J. H. Schmid, “Silicon photonic wire biosensor array for multiplexed real-time and label-free molecular detection,” Opt. Lett.34(23), 3598–3600 (2009). [CrossRef] [PubMed]
- M. Iqbal, M. A. Gleeson, B. Spaugh, F. Tybor, W. G. Gunn, M. Hochberg, T. B. Jones, R. C. Bailey, and L. C. Gunn, “Laber-Free biosensor arrays based on silicon ring resonators and high-speed optical scanning instrumentation,” IEEE J. Sel. Top. Quantum Electron.16(3), 654–661 (2010). [CrossRef]
- C. F. Carlborg, K. B. Gylfason, A. Kaźmierczak, F. Dortu, M. J. Bañuls Polo, A. Maquieira Catala, G. M. Kresbach, H. Sohlström, T. Moh, L. Vivien, J. Popplewell, G. Ronan, C. A. Barrios, G. Stemme, and W. van der Wijngaart, “A packaged optical slot-waveguide ring resonator sensor array for multiplex label-free assays in labs-on-chips,” Lab Chip10(3), 281–290 (2010). [CrossRef] [PubMed]
- K. B. Gylfason, C. F. Carlborg, A. Kaźmierczak, F. Dortu, H. Sohlström, L. Vivien, C. A. Barrios, W. van der Wijngaart, and G. Stemme, “On-chip temperature compensation in an integrated slot-waveguide ring resonator refractive index sensor array,” Opt. Express18(4), 3226–3237 (2010). [CrossRef] [PubMed]
- C. B. Kim and C. B. Su, “Measurement of the refractive index of liquids at 1.3 and 1.5 micron using a fibre optic Fresnel ratio meter,” Meas. Sci. Technol.15(9), 1683–1686 (2004). [CrossRef]
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Anal. Chim. Acta
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Lab Chip
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Opt. Express
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