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Hard-X-ray imaging optics based on four aspherical mirrors with 50 nm resolutionSatoshi Matsuyama, Naotaka Kidani, Hidekazu Mimura, Yasuhisa Sano, Yoshiki Kohmura, Kenji Tamasaku, Makina Yabashi, Tetsuya Ishikawa, and Kazuto Yamauchi »View Author Affiliations
Satoshi Matsuyama,1,*
Naotaka Kidani,1
Hidekazu Mimura,2
Yasuhisa Sano,1
Yoshiki Kohmura,3
Kenji Tamasaku,3
Makina Yabashi,3
Tetsuya Ishikawa,3
and Kazuto Yamauchi1,4
1Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan 2Department of Precision Engineering, School of Engineering, The University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-8656, Japan 3RIKEN/SPring-8, 1-1-1 Kouto, Sayo-cho, Sayo-gun, Hyogo 679-5148, Japan 4Research Center for Ultra-Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan *Corresponding author: matsuyama@prec.eng.osaka-u.ac.jp |
Optics Express, Vol. 20, Issue 9, pp. 10310-10319 (2012)
http://dx.doi.org/10.1364/OE.20.010310
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Abstract
Ultraprecise imaging optics, which consists of two sets of elliptical mirrors and hyperbolic mirrors aligned perpendicular to each other (i.e., advanced Kirkpatrick–Baez mirrrors), is developed to realize high-resolution and achromatic full-field hard-X-ray microscopy. Experiments to form a demagnified image (with horizontal and vertical demagnification factors of 385 and 210, respectively) are conducted to evaluate the optical system at an X-ray energy of 11.5 keV at SPring-8. Results show that the imaging system can form a demagnified image with nearly diffraction-limited resolutions of ~50 nm in the horizontal and vertical directions. The field of view is also experimentally estimated to be ~12 × ~14 μm2 when used as a magnification imaging system.
© 2012 OSA
OCIS Codes
(340.7460) X-ray optics : X-ray microscopy
(340.7470) X-ray optics : X-ray mirrors
ToC Category:
X-ray Optics
History
Original Manuscript: January 27, 2012
Revised Manuscript: March 26, 2012
Manuscript Accepted: March 28, 2012
Published: April 19, 2012
Virtual Issues
Vol. 7, Iss. 6 Virtual Journal for Biomedical Optics
Citation
Satoshi Matsuyama, Naotaka Kidani, Hidekazu Mimura, Yasuhisa Sano, Yoshiki Kohmura, Kenji Tamasaku, Makina Yabashi, Tetsuya Ishikawa, and Kazuto Yamauchi, "Hard-X-ray imaging optics based on four aspherical mirrors with 50 nm resolution," Opt. Express 20, 10310-10319 (2012)
http://www.opticsinfobase.org/vjbo/abstract.cfm?URI=oe-20-9-10310
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- P. Emma, R. Akre, J. Arthur, R. Bionta, C. Bostedt, J. Bozek, A. Brachmann, P. Bucksbaum, R. Coffee, F.-J. Decker, Y. Ding, D. Dowell, S. Edstrom, A. Fisher, J. Frisch, S. Gilevich, J. Hastings, G. Hays, P. Hering, Z. Huang, R. Iverson, H. Loos, M. Messerschmidt, A. Miahnahri, S. Moeller, H.-D. Nuhn, G. Pile, D. Ratner, J. Rzepiela, D. Schultz, T. Smith, P. Stefan, H. Tompkins, J. Turner, J. Welch, W. White, J. Wu, G. Yocky, and J. Galayda, “First lasing and operation of an ångstrom-wavelength free-electron laser,” Nat. Photonics4(9), 641–647 (2010). [CrossRef]
- P. Emma, R. Akre, J. Arthur, R. Bionta, C. Bostedt, J. Bozek, A. Brachmann, P. Bucksbaum, R. Coffee, F.-J. Decker, Y. Ding, D. Dowell, S. Edstrom, A. Fisher, J. Frisch, S. Gilevich, J. Hastings, G. Hays, P. Hering, Z. Huang, R. Iverson, H. Loos, M. Messerschmidt, A. Miahnahri, S. Moeller, H.-D. Nuhn, G. Pile, D. Ratner, J. Rzepiela, D. Schultz, T. Smith, P. Stefan, H. Tompkins, J. Turner, J. Welch, W. White, J. Wu, G. Yocky, and J. Galayda, “First lasing and operation of an ångstrom-wavelength free-electron laser,” Nat. Photonics4(9), 641–647 (2010). [CrossRef]
- S. Matsuyama, H. Mimura, H. Yumoto, H. Hara, K. Yamamura, Y. Sano, K. Endo, Y. Mori, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “Development of mirror manipulator for hard-x-ray nanofocusing at sub-50-nm level,” Rev. Sci. Instrum.77(9), 093107 (2006). [CrossRef]
- H. Mimura, H. Yumoto, S. Matsuyama, K. Yamamura, Y. Sano, K. Ueno, K. Endo, Y. Mori, M. Yabashi, K. Tamasaku, Y. Nishino, T. Ishikawa, and K. Yamauchi, “Relative angle determinable stitching interferometry for hard x-ray reflective optics,” Rev. Sci. Instrum.76(4), 045102 (2005). [CrossRef]
- K. Yamauchi, K. Yamamura, H. Mimura, Y. Sano, A. Saito, K. Endo, A. Souvorov, M. Yabashi, K. Tamasaku, T. Ishikawa, and Y. Mori, “Wave-optical evaluation of interference fringes and wavefront phase in a hard-x-ray beam totally reflected by mirror optics,” Appl. Opt.44(32), 6927–6932 (2005). [CrossRef] [PubMed]
- K. Yamauchi, K. Yamamura, H. Mimura, Y. Sano, A. Saito, K. Ueno, K. Endo, A. Souvorov, M. Yabashi, K. Tamasaku, T. Ishikawa, and Y. Mori, “Microstitching interferometry for x-ray reflective optics,” Rev. Sci. Instrum.74(5), 2894 (2003). [CrossRef]
- C. G. Schroer, O. Kurapova, J. Patommel, P. Boye, J. Feldkamp, B. Lengeler, M. Burghammer, C. Riekel, L. Vincze, A. van der Hart, and M. Küchler, “Hard x-ray nanoprobe based on refractive x-ray lenses,” Appl. Phys. Lett.87(12), 124103 (2005). [CrossRef]
- P. Emma, R. Akre, J. Arthur, R. Bionta, C. Bostedt, J. Bozek, A. Brachmann, P. Bucksbaum, R. Coffee, F.-J. Decker, Y. Ding, D. Dowell, S. Edstrom, A. Fisher, J. Frisch, S. Gilevich, J. Hastings, G. Hays, P. Hering, Z. Huang, R. Iverson, H. Loos, M. Messerschmidt, A. Miahnahri, S. Moeller, H.-D. Nuhn, G. Pile, D. Ratner, J. Rzepiela, D. Schultz, T. Smith, P. Stefan, H. Tompkins, J. Turner, J. Welch, W. White, J. Wu, G. Yocky, and J. Galayda, “First lasing and operation of an ångstrom-wavelength free-electron laser,” Nat. Photonics4(9), 641–647 (2010). [CrossRef]
- P. Emma, R. Akre, J. Arthur, R. Bionta, C. Bostedt, J. Bozek, A. Brachmann, P. Bucksbaum, R. Coffee, F.-J. Decker, Y. Ding, D. Dowell, S. Edstrom, A. Fisher, J. Frisch, S. Gilevich, J. Hastings, G. Hays, P. Hering, Z. Huang, R. Iverson, H. Loos, M. Messerschmidt, A. Miahnahri, S. Moeller, H.-D. Nuhn, G. Pile, D. Ratner, J. Rzepiela, D. Schultz, T. Smith, P. Stefan, H. Tompkins, J. Turner, J. Welch, W. White, J. Wu, G. Yocky, and J. Galayda, “First lasing and operation of an ångstrom-wavelength free-electron laser,” Nat. Photonics4(9), 641–647 (2010). [CrossRef]
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- P. Emma, R. Akre, J. Arthur, R. Bionta, C. Bostedt, J. Bozek, A. Brachmann, P. Bucksbaum, R. Coffee, F.-J. Decker, Y. Ding, D. Dowell, S. Edstrom, A. Fisher, J. Frisch, S. Gilevich, J. Hastings, G. Hays, P. Hering, Z. Huang, R. Iverson, H. Loos, M. Messerschmidt, A. Miahnahri, S. Moeller, H.-D. Nuhn, G. Pile, D. Ratner, J. Rzepiela, D. Schultz, T. Smith, P. Stefan, H. Tompkins, J. Turner, J. Welch, W. White, J. Wu, G. Yocky, and J. Galayda, “First lasing and operation of an ångstrom-wavelength free-electron laser,” Nat. Photonics4(9), 641–647 (2010). [CrossRef]
- P. Emma, R. Akre, J. Arthur, R. Bionta, C. Bostedt, J. Bozek, A. Brachmann, P. Bucksbaum, R. Coffee, F.-J. Decker, Y. Ding, D. Dowell, S. Edstrom, A. Fisher, J. Frisch, S. Gilevich, J. Hastings, G. Hays, P. Hering, Z. Huang, R. Iverson, H. Loos, M. Messerschmidt, A. Miahnahri, S. Moeller, H.-D. Nuhn, G. Pile, D. Ratner, J. Rzepiela, D. Schultz, T. Smith, P. Stefan, H. Tompkins, J. Turner, J. Welch, W. White, J. Wu, G. Yocky, and J. Galayda, “First lasing and operation of an ångstrom-wavelength free-electron laser,” Nat. Photonics4(9), 641–647 (2010). [CrossRef]
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- S. Matsuyama, H. Mimura, H. Yumoto, H. Hara, K. Yamamura, Y. Sano, K. Endo, Y. Mori, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “Development of mirror manipulator for hard-x-ray nanofocusing at sub-50-nm level,” Rev. Sci. Instrum.77(9), 093107 (2006). [CrossRef]
- P. Emma, R. Akre, J. Arthur, R. Bionta, C. Bostedt, J. Bozek, A. Brachmann, P. Bucksbaum, R. Coffee, F.-J. Decker, Y. Ding, D. Dowell, S. Edstrom, A. Fisher, J. Frisch, S. Gilevich, J. Hastings, G. Hays, P. Hering, Z. Huang, R. Iverson, H. Loos, M. Messerschmidt, A. Miahnahri, S. Moeller, H.-D. Nuhn, G. Pile, D. Ratner, J. Rzepiela, D. Schultz, T. Smith, P. Stefan, H. Tompkins, J. Turner, J. Welch, W. White, J. Wu, G. Yocky, and J. Galayda, “First lasing and operation of an ångstrom-wavelength free-electron laser,” Nat. Photonics4(9), 641–647 (2010). [CrossRef]
- P. Emma, R. Akre, J. Arthur, R. Bionta, C. Bostedt, J. Bozek, A. Brachmann, P. Bucksbaum, R. Coffee, F.-J. Decker, Y. Ding, D. Dowell, S. Edstrom, A. Fisher, J. Frisch, S. Gilevich, J. Hastings, G. Hays, P. Hering, Z. Huang, R. Iverson, H. Loos, M. Messerschmidt, A. Miahnahri, S. Moeller, H.-D. Nuhn, G. Pile, D. Ratner, J. Rzepiela, D. Schultz, T. Smith, P. Stefan, H. Tompkins, J. Turner, J. Welch, W. White, J. Wu, G. Yocky, and J. Galayda, “First lasing and operation of an ångstrom-wavelength free-electron laser,” Nat. Photonics4(9), 641–647 (2010). [CrossRef]
- P. Emma, R. Akre, J. Arthur, R. Bionta, C. Bostedt, J. Bozek, A. Brachmann, P. Bucksbaum, R. Coffee, F.-J. Decker, Y. Ding, D. Dowell, S. Edstrom, A. Fisher, J. Frisch, S. Gilevich, J. Hastings, G. Hays, P. Hering, Z. Huang, R. Iverson, H. Loos, M. Messerschmidt, A. Miahnahri, S. Moeller, H.-D. Nuhn, G. Pile, D. Ratner, J. Rzepiela, D. Schultz, T. Smith, P. Stefan, H. Tompkins, J. Turner, J. Welch, W. White, J. Wu, G. Yocky, and J. Galayda, “First lasing and operation of an ångstrom-wavelength free-electron laser,” Nat. Photonics4(9), 641–647 (2010). [CrossRef]
- M. Hoshino, T. Ishino, T. Namiki, N. Yamada, N. Watanabe, and S. Aoki, “Application of a charge-coupled device photon-counting technique to three-dimensional element analysis of a plant seed (alfalfa) using a full-field x-ray fluorescence imaging microscope,” Rev. Sci. Instrum.78(7), 073706 (2007). [CrossRef] [PubMed]
- P. Emma, R. Akre, J. Arthur, R. Bionta, C. Bostedt, J. Bozek, A. Brachmann, P. Bucksbaum, R. Coffee, F.-J. Decker, Y. Ding, D. Dowell, S. Edstrom, A. Fisher, J. Frisch, S. Gilevich, J. Hastings, G. Hays, P. Hering, Z. Huang, R. Iverson, H. Loos, M. Messerschmidt, A. Miahnahri, S. Moeller, H.-D. Nuhn, G. Pile, D. Ratner, J. Rzepiela, D. Schultz, T. Smith, P. Stefan, H. Tompkins, J. Turner, J. Welch, W. White, J. Wu, G. Yocky, and J. Galayda, “First lasing and operation of an ångstrom-wavelength free-electron laser,” Nat. Photonics4(9), 641–647 (2010). [CrossRef]
- W. Liu, G. E. Ice, J. Z. Tischler, A. Khounsary, C. Liu, L. Assoufid, and A. T. Macrander, “Short focal length Kirkpatrick-Baez mirrors for a hard x-ray nanoprobe,” Rev. Sci. Instrum.76(11), 113701 (2005). [CrossRef]
- Y. Nishino, Y. Takahashi, N. Imamoto, T. Ishikawa, and K. Maeshima, “Three-dimensional visualization of a human chromosome using coherent X-ray diffraction,” Phys. Rev. Lett.102(1), 018101 (2009). [CrossRef] [PubMed]
- K. Yamauchi, H. Mimura, K. Inagaki, and Y. Mori, “Figuring with subnanometer-level accuracy by numerically controlled elastic emission machining,” Rev. Sci. Instrum.73(11), 4028 (2002). [CrossRef]
- S. Matsuyama, T. Wakioka, N. Kidani, T. Kimura, H. Mimura, Y. Sano, Y. Nishino, M. Yabashi, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “One-dimensional Wolter optics with a sub-50 nm spatial resolution,” Opt. Lett.35(21), 3583–3585 (2010). [CrossRef] [PubMed]
- Y. Nishino, Y. Takahashi, N. Imamoto, T. Ishikawa, and K. Maeshima, “Three-dimensional visualization of a human chromosome using coherent X-ray diffraction,” Phys. Rev. Lett.102(1), 018101 (2009). [CrossRef] [PubMed]
- H. Mimura, H. Yumoto, S. Matsuyama, Y. Sano, K. Yamamura, Y. Mori, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “Efficient focusing of hard x rays to 25 nm by a total reflection mirror,” Appl. Phys. Lett.90(5), 051903 (2007). [CrossRef]
- S. Matsuyama, H. Mimura, H. Yumoto, Y. Sano, K. Yamamura, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “Development of scanning x-ray fluorescence microscope with spatial resolution of 30 nm using Kirkpatrick-Baez mirror optics,” Rev. Sci. Instrum.77(10), 103102 (2006). [CrossRef]
- S. Matsuyama, H. Mimura, H. Yumoto, H. Hara, K. Yamamura, Y. Sano, K. Endo, Y. Mori, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “Development of mirror manipulator for hard-x-ray nanofocusing at sub-50-nm level,” Rev. Sci. Instrum.77(9), 093107 (2006). [CrossRef]
- H. Mimura, H. Yumoto, S. Matsuyama, K. Yamamura, Y. Sano, K. Ueno, K. Endo, Y. Mori, M. Yabashi, K. Tamasaku, Y. Nishino, T. Ishikawa, and K. Yamauchi, “Relative angle determinable stitching interferometry for hard x-ray reflective optics,” Rev. Sci. Instrum.76(4), 045102 (2005). [CrossRef]
- K. Yamauchi, K. Yamamura, H. Mimura, Y. Sano, A. Saito, K. Endo, A. Souvorov, M. Yabashi, K. Tamasaku, T. Ishikawa, and Y. Mori, “Wave-optical evaluation of interference fringes and wavefront phase in a hard-x-ray beam totally reflected by mirror optics,” Appl. Opt.44(32), 6927–6932 (2005). [CrossRef] [PubMed]
- K. Yamauchi, K. Yamamura, H. Mimura, Y. Sano, A. Saito, K. Ueno, K. Endo, A. Souvorov, M. Yabashi, K. Tamasaku, T. Ishikawa, and Y. Mori, “Microstitching interferometry for x-ray reflective optics,” Rev. Sci. Instrum.74(5), 2894 (2003). [CrossRef]
- K. Tamasaku, Y. Tanaka, M. Yabashi, H. Yamazaki, N. Kawamura, M. Suzuki, and T. Ishikawa, “SPring-8 RIKEN beamline III for coherent X-ray optics,” Nucl. Instrum. Methods Phys. Res. A467-468, 686–689 (2001). [CrossRef]
- M. Hoshino, T. Ishino, T. Namiki, N. Yamada, N. Watanabe, and S. Aoki, “Application of a charge-coupled device photon-counting technique to three-dimensional element analysis of a plant seed (alfalfa) using a full-field x-ray fluorescence imaging microscope,” Rev. Sci. Instrum.78(7), 073706 (2007). [CrossRef] [PubMed]
- P. Emma, R. Akre, J. Arthur, R. Bionta, C. Bostedt, J. Bozek, A. Brachmann, P. Bucksbaum, R. Coffee, F.-J. Decker, Y. Ding, D. Dowell, S. Edstrom, A. Fisher, J. Frisch, S. Gilevich, J. Hastings, G. Hays, P. Hering, Z. Huang, R. Iverson, H. Loos, M. Messerschmidt, A. Miahnahri, S. Moeller, H.-D. Nuhn, G. Pile, D. Ratner, J. Rzepiela, D. Schultz, T. Smith, P. Stefan, H. Tompkins, J. Turner, J. Welch, W. White, J. Wu, G. Yocky, and J. Galayda, “First lasing and operation of an ångstrom-wavelength free-electron laser,” Nat. Photonics4(9), 641–647 (2010). [CrossRef]
- K. Tamasaku, Y. Tanaka, M. Yabashi, H. Yamazaki, N. Kawamura, M. Suzuki, and T. Ishikawa, “SPring-8 RIKEN beamline III for coherent X-ray optics,” Nucl. Instrum. Methods Phys. Res. A467-468, 686–689 (2001). [CrossRef]
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- J. Miao, P. Charalambous, J. Kirz, and D. Sayre, “Extending the methodology of X-ray crystallography to allow imaging of micrometre-sized non-crystalline specimens,” Nature400(6742), 342–344 (1999). [CrossRef]
- C. G. Schroer, O. Kurapova, J. Patommel, P. Boye, J. Feldkamp, B. Lengeler, M. Burghammer, C. Riekel, L. Vincze, A. van der Hart, and M. Küchler, “Hard x-ray nanoprobe based on refractive x-ray lenses,” Appl. Phys. Lett.87(12), 124103 (2005). [CrossRef]
- B. Lengeler, C. G. Schroer, M. Kuhlmann, B. Benner, T. F. Günzler, O. Kurapova, F. Zontone, A. Snigirev, and I. Snigireva, “Refractive x-ray lenses,” J. Phys. D Appl. Phys.38(10A), A218–A222 (2005). [CrossRef]
- B. Lengeler, C. G. Schroer, M. Kuhlmann, B. Benner, T. F. Günzler, O. Kurapova, F. Zontone, A. Snigirev, and I. Snigireva, “Refractive x-ray lenses,” J. Phys. D Appl. Phys.38(10A), A218–A222 (2005). [CrossRef]
- C. G. Schroer, O. Kurapova, J. Patommel, P. Boye, J. Feldkamp, B. Lengeler, M. Burghammer, C. Riekel, L. Vincze, A. van der Hart, and M. Küchler, “Hard x-ray nanoprobe based on refractive x-ray lenses,” Appl. Phys. Lett.87(12), 124103 (2005). [CrossRef]
- B. Lengeler, C. G. Schroer, M. Kuhlmann, B. Benner, T. F. Günzler, O. Kurapova, F. Zontone, A. Snigirev, and I. Snigireva, “Refractive x-ray lenses,” J. Phys. D Appl. Phys.38(10A), A218–A222 (2005). [CrossRef]
- C. G. Schroer, O. Kurapova, J. Patommel, P. Boye, J. Feldkamp, B. Lengeler, M. Burghammer, C. Riekel, L. Vincze, A. van der Hart, and M. Küchler, “Hard x-ray nanoprobe based on refractive x-ray lenses,” Appl. Phys. Lett.87(12), 124103 (2005). [CrossRef]
- W. Liu, G. E. Ice, J. Z. Tischler, A. Khounsary, C. Liu, L. Assoufid, and A. T. Macrander, “Short focal length Kirkpatrick-Baez mirrors for a hard x-ray nanoprobe,” Rev. Sci. Instrum.76(11), 113701 (2005). [CrossRef]
- W. Liu, G. E. Ice, J. Z. Tischler, A. Khounsary, C. Liu, L. Assoufid, and A. T. Macrander, “Short focal length Kirkpatrick-Baez mirrors for a hard x-ray nanoprobe,” Rev. Sci. Instrum.76(11), 113701 (2005). [CrossRef]
- P. Emma, R. Akre, J. Arthur, R. Bionta, C. Bostedt, J. Bozek, A. Brachmann, P. Bucksbaum, R. Coffee, F.-J. Decker, Y. Ding, D. Dowell, S. Edstrom, A. Fisher, J. Frisch, S. Gilevich, J. Hastings, G. Hays, P. Hering, Z. Huang, R. Iverson, H. Loos, M. Messerschmidt, A. Miahnahri, S. Moeller, H.-D. Nuhn, G. Pile, D. Ratner, J. Rzepiela, D. Schultz, T. Smith, P. Stefan, H. Tompkins, J. Turner, J. Welch, W. White, J. Wu, G. Yocky, and J. Galayda, “First lasing and operation of an ångstrom-wavelength free-electron laser,” Nat. Photonics4(9), 641–647 (2010). [CrossRef]
- W. Liu, G. E. Ice, J. Z. Tischler, A. Khounsary, C. Liu, L. Assoufid, and A. T. Macrander, “Short focal length Kirkpatrick-Baez mirrors for a hard x-ray nanoprobe,” Rev. Sci. Instrum.76(11), 113701 (2005). [CrossRef]
- Y. Nishino, Y. Takahashi, N. Imamoto, T. Ishikawa, and K. Maeshima, “Three-dimensional visualization of a human chromosome using coherent X-ray diffraction,” Phys. Rev. Lett.102(1), 018101 (2009). [CrossRef] [PubMed]
- S. Matsuyama, T. Wakioka, N. Kidani, T. Kimura, H. Mimura, Y. Sano, Y. Nishino, M. Yabashi, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “One-dimensional Wolter optics with a sub-50 nm spatial resolution,” Opt. Lett.35(21), 3583–3585 (2010). [CrossRef] [PubMed]
- S. Matsuyama, M. Fujii, and K. Yamauchi, “Simulation study of four-mirror alignment of advanced Kirkpatrick−Baez optics,” Nucl. Instrum. Methods Phys. Res. A616(2-3), 241–245 (2010). [CrossRef]
- H. Mimura, H. Yumoto, S. Matsuyama, Y. Sano, K. Yamamura, Y. Mori, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “Efficient focusing of hard x rays to 25 nm by a total reflection mirror,” Appl. Phys. Lett.90(5), 051903 (2007). [CrossRef]
- S. Matsuyama, H. Mimura, H. Yumoto, H. Hara, K. Yamamura, Y. Sano, K. Endo, Y. Mori, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “Development of mirror manipulator for hard-x-ray nanofocusing at sub-50-nm level,” Rev. Sci. Instrum.77(9), 093107 (2006). [CrossRef]
- S. Matsuyama, H. Mimura, H. Yumoto, Y. Sano, K. Yamamura, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “Development of scanning x-ray fluorescence microscope with spatial resolution of 30 nm using Kirkpatrick-Baez mirror optics,” Rev. Sci. Instrum.77(10), 103102 (2006). [CrossRef]
- H. Mimura, H. Yumoto, S. Matsuyama, K. Yamamura, Y. Sano, K. Ueno, K. Endo, Y. Mori, M. Yabashi, K. Tamasaku, Y. Nishino, T. Ishikawa, and K. Yamauchi, “Relative angle determinable stitching interferometry for hard x-ray reflective optics,” Rev. Sci. Instrum.76(4), 045102 (2005). [CrossRef]
- S. Matsuyama, “Wave-optical and ray-tracing analysis to establish a compact two-dimensional focusing unit using K-B mirror arrangement,” Proc. SPIE5533, 181–191 (2004). [CrossRef]
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- P. Emma, R. Akre, J. Arthur, R. Bionta, C. Bostedt, J. Bozek, A. Brachmann, P. Bucksbaum, R. Coffee, F.-J. Decker, Y. Ding, D. Dowell, S. Edstrom, A. Fisher, J. Frisch, S. Gilevich, J. Hastings, G. Hays, P. Hering, Z. Huang, R. Iverson, H. Loos, M. Messerschmidt, A. Miahnahri, S. Moeller, H.-D. Nuhn, G. Pile, D. Ratner, J. Rzepiela, D. Schultz, T. Smith, P. Stefan, H. Tompkins, J. Turner, J. Welch, W. White, J. Wu, G. Yocky, and J. Galayda, “First lasing and operation of an ångstrom-wavelength free-electron laser,” Nat. Photonics4(9), 641–647 (2010). [CrossRef]
- J. Miao, P. Charalambous, J. Kirz, and D. Sayre, “Extending the methodology of X-ray crystallography to allow imaging of micrometre-sized non-crystalline specimens,” Nature400(6742), 342–344 (1999). [CrossRef]
- S. Matsuyama, T. Wakioka, N. Kidani, T. Kimura, H. Mimura, Y. Sano, Y. Nishino, M. Yabashi, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “One-dimensional Wolter optics with a sub-50 nm spatial resolution,” Opt. Lett.35(21), 3583–3585 (2010). [CrossRef] [PubMed]
- H. Mimura, H. Yumoto, S. Matsuyama, Y. Sano, K. Yamamura, Y. Mori, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “Efficient focusing of hard x rays to 25 nm by a total reflection mirror,” Appl. Phys. Lett.90(5), 051903 (2007). [CrossRef]
- S. Matsuyama, H. Mimura, H. Yumoto, H. Hara, K. Yamamura, Y. Sano, K. Endo, Y. Mori, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “Development of mirror manipulator for hard-x-ray nanofocusing at sub-50-nm level,” Rev. Sci. Instrum.77(9), 093107 (2006). [CrossRef]
- S. Matsuyama, H. Mimura, H. Yumoto, Y. Sano, K. Yamamura, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “Development of scanning x-ray fluorescence microscope with spatial resolution of 30 nm using Kirkpatrick-Baez mirror optics,” Rev. Sci. Instrum.77(10), 103102 (2006). [CrossRef]
- K. Yamauchi, K. Yamamura, H. Mimura, Y. Sano, A. Saito, K. Endo, A. Souvorov, M. Yabashi, K. Tamasaku, T. Ishikawa, and Y. Mori, “Wave-optical evaluation of interference fringes and wavefront phase in a hard-x-ray beam totally reflected by mirror optics,” Appl. Opt.44(32), 6927–6932 (2005). [CrossRef] [PubMed]
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- K. Yamauchi, K. Yamamura, H. Mimura, Y. Sano, A. Saito, K. Ueno, K. Endo, A. Souvorov, M. Yabashi, K. Tamasaku, T. Ishikawa, and Y. Mori, “Microstitching interferometry for x-ray reflective optics,” Rev. Sci. Instrum.74(5), 2894 (2003). [CrossRef]
- K. Yamauchi, H. Mimura, K. Inagaki, and Y. Mori, “Figuring with subnanometer-level accuracy by numerically controlled elastic emission machining,” Rev. Sci. Instrum.73(11), 4028 (2002). [CrossRef]
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