Ultrafast pump-probe microscopy is a common method for time and space resolved imaging of short and ultra-short pulse laser ablation. The temporal delay between the ablating pump pulse and the illuminating probe pulse is tuned either by an optical delay, resulting in several hundred femtoseconds temporal resolution for delay times up to a few ns, or by an electronic delay, resulting in several nanoseconds resolution for longer delay times. In this work we combine both delay types for temporally high resolved observations of complete ablation processes ranging from femtoseconds to microseconds, while ablation is initiated by an ultrafast 660 fs laser pump pulse. For this purpose, we also demonstrate the calibration of the delay time zero point, the synchronization of both probe sources, as well as a method for image quality enhancing. In addition, we present for the first time to our knowledge pump-probe microscopy investigations of the complete substrate side selective ablation process of molybdenum films on glass. The initiation of mechanical film deformation is observed at about 400 ps, continues until approximately 15 ns, whereupon a Mo disk is sheared off free from thermal effects due to a directly induced laser lift-off ablation process.

© 2012 OSA

1. J. Hermann, M. Benfarah, S. Bruneau, E. Axente, G. Coustillier, T. Itina, J.-F. Guillemoles, and P. Alloncle, “Comparative investigation of solar cell thin film processing using nanosecond and femtosecond lasers,” J. Phys. D Appl. Phys.39(3), 453–460 (2006). [CrossRef]
2. J. Hermann, M. Benfarah, G. Coustillier, S. Bruneau, E. Axente, J.-F. Guillemoles, M. Sentis, P. Alloncle, and T. Itina, “Selective ablation of thin films with short and ultrashort laser pulses,” Appl. Surf. Sci.252(13), 4814–4818 (2006). [CrossRef]
3. S. Zoppel, H. Huber, and G. Reider, “Selective ablation of thin Mo and TCO films with femtosecond laser pulses for structuring thin film solar cells,” Appl. Phys, A-Mater.89, 161–163 (2007).
4. A. Compaan, I. Matulionis, and S. Nakade, “Laser scribing of polycrystalline thin films,” Opt. Lasers Eng.34(1), 15–45 (2000). [CrossRef]
5. G. Heise, M. Englmaier, C. Hellwig, T. Kuznicki, S. Sarrach, and H. Huber, “Laser ablation of thin molybdenum films on transparent substrates at low fluences,” Appl. Phys, A-Mater.102, 173–178 (2011).
6. B. Chichkov, C. Momma, S. Nolte, F. Von Alvensleben, and A. Tünnermann, “Femtosecond, picosecond and nanosecond laser ablation of solids,” Appl. Phys, A-Mater.63, 109–115 (1997).
7. C. Momma, B. Chichkov, S. Nolte, F. Von Alvensleben, A. Tünnermann, H. Welling, and B. Wellegehausen, “Short-pulse laser ablation of solid targets,” Opt. Commun.129(1-2), 134–142 (1996). [CrossRef]
8. S. Nolte, C. Momma, H. Jacobs, A. Tünnermann, B. Chichkov, B. Wellegehausen, and H. Welling, “Ablation of metals by ultrashort laser pulses,” J. Opt. Soc. Am. B14(10), 2716–2722 (1997). [CrossRef]
9. G. Heise, M. Dickmann, M. Domke, A. Heiss, T. Kuznicki, J. Palm, I. Richter, H. Vogt, and H. Huber, “Investigation of the ablation of zinc oxide thin films on copper-indium-selenide layers by ps laser pulses,” Appl. Phys, A-Mater.104, 387–393 (2011).
10. A. Pique, D. Chrisey, R. Auyeung, J. Fitz-Gerald, H. Wu, R. McGill, S. Lakeou, P. Wu, V. Nguyen, and M. Duignan, “A novel laser transfer process for direct writing of electronic and sensor materials,” Appl. Phys, A-Mater.69, 279–284 (1999).
11. G. Heise, J. Konrad, S. Sarrach, J. Sotrop, and H. Huber, “Directly induced ablation of metal thin films by ultrashort laser pulses,” Proc. SPIE7925, 792511, 792511-8 (2011). [CrossRef]
12. M. Downer, R. Fork, and C. Shank, “Femtosecond imaging of melting and evaporation at a photoexcited silicon surface,” J. Opt. Soc. Am. B2(4), 595–599 (1985). [CrossRef]
13. D. von der Linde and K. Sokolowski-Tinten, “Physical mechanisms of short-pulse laser ablation,” Appl. Surf. Sci.154–155, 1–10 (2000). [CrossRef]
14. J. Bonse, G. Bachelier, J. Siegel, J. Solis, and H. Sturm, “Time- and space-resolved dynamics of ablation and optical breakdown induced by femtosecond laser pulses in indium phosphide,” J. Appl. Phys.103(5), 054910 (2008). [CrossRef]
15. I. Mingareev and A. Horn, “Melt dynamics of aluminum irradiated with ultrafast laser radiation at large intensities,” J. Appl. Phys.106(1), 013513 (2009). [CrossRef]
16. D. von der Linde, K. Sokolowski-Tinten, and J. Bialkowski, “Laser-solid interaction in the femtosecond time regime,” Appl. Surf. Sci.109–110, 1–10 (1997). [CrossRef]
17. J. McDonald, J. Nees, and S. Yalisove, “Pump-probe imaging of femtosecond pulsed laser ablation of silicon with thermally grown oxide films,” J. Appl. Phys.102(6), 063109 (2007). [CrossRef]
18. D. Dlott, “Ultra-low threshold laser ablation investigated by time-resolved microscopy,” Appl. Surf. Sci.197–198, 3–10 (2002). [CrossRef]
19. D. Young, R. Auyeung, A. Pique, D. Chrisey, and D. Dlott, “Time-resolved optical microscopy of a laser-based forward transfer process,” Appl. Phys. Lett.78(21), 3169 (2001). [CrossRef]
20. C. Unger, M. Gruene, L. Koch, J. Koch, and B. Chichkov, “Time-resolved imaging of hydrogel printing via laser-induced forward transfer,” Appl. Phys, A-Mater.103, 271–277 (2011).
21. I. Zergioti, D. G. Papazoglou, A. Karaiskou, C. Fotakis, E. Gamaly, and A. Rode, “A comparative schlieren imaging study between ns and sub-ps laser forward transfer of Cr,” Appl. Surf. Sci.208–209, 177–180 (2003). [CrossRef]
22. I. Zergioti, A. Karaiskou, D. G. Papazoglou, C. Fotakis, M. Kapsetaki, and D. Kafetzopoulos, “Time resolved schlieren study of sub-picosecond and nanosecond laser transfer of biomaterials,” Appl. Surf. Sci.247(1-4), 584–589 (2005). [CrossRef]
23. B. Rethfeld, K. Sokolowski-Tinten, D. Von Der Linde, and S. Anisimov, “Timescales in the response of materials to femtosecond laser excitation,” Appl. Phys, A-Mater.79, 767–769 (2004).
24. M. Domke, G. Heise, I. Richter, S. Sarrach, and H. Huber, “Pump-probe investigations on the laser ablation of CIS thin film solar cells,” Physics Procedia12, 396–406 (2011). [CrossRef]

Appl. Phys, A-Mater.

• S. Zoppel, H. Huber, and G. Reider, “Selective ablation of thin Mo and TCO films with femtosecond laser pulses for structuring thin film solar cells,” Appl. Phys, A-Mater.89, 161–163 (2007).
• G. Heise, M. Englmaier, C. Hellwig, T. Kuznicki, S. Sarrach, and H. Huber, “Laser ablation of thin molybdenum films on transparent substrates at low fluences,” Appl. Phys, A-Mater.102, 173–178 (2011).
• B. Chichkov, C. Momma, S. Nolte, F. Von Alvensleben, and A. Tünnermann, “Femtosecond, picosecond and nanosecond laser ablation of solids,” Appl. Phys, A-Mater.63, 109–115 (1997).
• G. Heise, M. Dickmann, M. Domke, A. Heiss, T. Kuznicki, J. Palm, I. Richter, H. Vogt, and H. Huber, “Investigation of the ablation of zinc oxide thin films on copper-indium-selenide layers by ps laser pulses,” Appl. Phys, A-Mater.104, 387–393 (2011).
• A. Pique, D. Chrisey, R. Auyeung, J. Fitz-Gerald, H. Wu, R. McGill, S. Lakeou, P. Wu, V. Nguyen, and M. Duignan, “A novel laser transfer process for direct writing of electronic and sensor materials,” Appl. Phys, A-Mater.69, 279–284 (1999).
• C. Unger, M. Gruene, L. Koch, J. Koch, and B. Chichkov, “Time-resolved imaging of hydrogel printing via laser-induced forward transfer,” Appl. Phys, A-Mater.103, 271–277 (2011).
• B. Rethfeld, K. Sokolowski-Tinten, D. Von Der Linde, and S. Anisimov, “Timescales in the response of materials to femtosecond laser excitation,” Appl. Phys, A-Mater.79, 767–769 (2004).

Appl. Phys. Lett.

• D. Young, R. Auyeung, A. Pique, D. Chrisey, and D. Dlott, “Time-resolved optical microscopy of a laser-based forward transfer process,” Appl. Phys. Lett.78(21), 3169 (2001). [CrossRef]

Appl. Surf. Sci.

• D. Dlott, “Ultra-low threshold laser ablation investigated by time-resolved microscopy,” Appl. Surf. Sci.197–198, 3–10 (2002). [CrossRef]
• D. von der Linde, K. Sokolowski-Tinten, and J. Bialkowski, “Laser-solid interaction in the femtosecond time regime,” Appl. Surf. Sci.109–110, 1–10 (1997). [CrossRef]
• D. von der Linde and K. Sokolowski-Tinten, “Physical mechanisms of short-pulse laser ablation,” Appl. Surf. Sci.154–155, 1–10 (2000). [CrossRef]
• J. Hermann, M. Benfarah, G. Coustillier, S. Bruneau, E. Axente, J.-F. Guillemoles, M. Sentis, P. Alloncle, and T. Itina, “Selective ablation of thin films with short and ultrashort laser pulses,” Appl. Surf. Sci.252(13), 4814–4818 (2006). [CrossRef]
• I. Zergioti, D. G. Papazoglou, A. Karaiskou, C. Fotakis, E. Gamaly, and A. Rode, “A comparative schlieren imaging study between ns and sub-ps laser forward transfer of Cr,” Appl. Surf. Sci.208–209, 177–180 (2003). [CrossRef]
• I. Zergioti, A. Karaiskou, D. G. Papazoglou, C. Fotakis, M. Kapsetaki, and D. Kafetzopoulos, “Time resolved schlieren study of sub-picosecond and nanosecond laser transfer of biomaterials,” Appl. Surf. Sci.247(1-4), 584–589 (2005). [CrossRef]

J. Appl. Phys.

• J. Bonse, G. Bachelier, J. Siegel, J. Solis, and H. Sturm, “Time- and space-resolved dynamics of ablation and optical breakdown induced by femtosecond laser pulses in indium phosphide,” J. Appl. Phys.103(5), 054910 (2008). [CrossRef]
• I. Mingareev and A. Horn, “Melt dynamics of aluminum irradiated with ultrafast laser radiation at large intensities,” J. Appl. Phys.106(1), 013513 (2009). [CrossRef]
• J. McDonald, J. Nees, and S. Yalisove, “Pump-probe imaging of femtosecond pulsed laser ablation of silicon with thermally grown oxide films,” J. Appl. Phys.102(6), 063109 (2007). [CrossRef]

J. Opt. Soc. Am. B

• S. Nolte, C. Momma, H. Jacobs, A. Tünnermann, B. Chichkov, B. Wellegehausen, and H. Welling, “Ablation of metals by ultrashort laser pulses,” J. Opt. Soc. Am. B14(10), 2716–2722 (1997). [CrossRef]
• M. Downer, R. Fork, and C. Shank, “Femtosecond imaging of melting and evaporation at a photoexcited silicon surface,” J. Opt. Soc. Am. B2(4), 595–599 (1985). [CrossRef]

J. Phys. D Appl. Phys.

• J. Hermann, M. Benfarah, S. Bruneau, E. Axente, G. Coustillier, T. Itina, J.-F. Guillemoles, and P. Alloncle, “Comparative investigation of solar cell thin film processing using nanosecond and femtosecond lasers,” J. Phys. D Appl. Phys.39(3), 453–460 (2006). [CrossRef]

Opt. Commun.

• C. Momma, B. Chichkov, S. Nolte, F. Von Alvensleben, A. Tünnermann, H. Welling, and B. Wellegehausen, “Short-pulse laser ablation of solid targets,” Opt. Commun.129(1-2), 134–142 (1996). [CrossRef]

Opt. Lasers Eng.

• A. Compaan, I. Matulionis, and S. Nakade, “Laser scribing of polycrystalline thin films,” Opt. Lasers Eng.34(1), 15–45 (2000). [CrossRef]

Physics Procedia

• M. Domke, G. Heise, I. Richter, S. Sarrach, and H. Huber, “Pump-probe investigations on the laser ablation of CIS thin film solar cells,” Physics Procedia12, 396–406 (2011). [CrossRef]

Proc. SPIE

• G. Heise, J. Konrad, S. Sarrach, J. Sotrop, and H. Huber, “Directly induced ablation of metal thin films by ultrashort laser pulses,” Proc. SPIE7925, 792511, 792511-8 (2011). [CrossRef]

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