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Virtual Journal for Biomedical Optics

Virtual Journal for Biomedical Optics

| EXPLORING THE INTERFACE OF LIGHT AND BIOMEDICINE

  • Editors: Andrew Dunn and Anthony Durkin
  • Vol. 8, Iss. 10 — Nov. 8, 2013

MEMS Fabry-Perot sensor interrogated by optical system-on-a-chip for simultaneous pressure and temperature sensing

Cheng Pang, Hyungdae Bae, Ashwani Gupta, Kenneth Bryden, and Miao Yu  »View Author Affiliations


Optics Express, Vol. 21, Issue 19, pp. 21829-21839 (2013)
http://dx.doi.org/10.1364/OE.21.021829


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Abstract

We present a micro-electro-mechanical systems (MEMS) based Fabry-Perot (FP) sensor along with an optical system-on-a-chip (SOC) interrogator for simultaneous pressure and temperature sensing. The sensor employs a simple structure with an air-backed silicon membrane cross-axially bonded to a 45° polished optical fiber. This structure renders two cascaded FP cavities, enabling simultaneous pressure and temperature sensing in close proximity along the optical axis. The optical SOC consists of a broadband source, a MEMS FP tunable filter, a photodetector, and the supporting circuitry, serving as a miniature spectrometer for retrieving the two FP cavity lengths. Within the measured pressure and temperature ranges, experimental results demonstrate that the sensor exhibits a good linear response to external pressure and temperature changes.

© 2013 OSA

OCIS Codes
(060.2370) Fiber optics and optical communications : Fiber optics sensors
(060.2630) Fiber optics and optical communications : Frequency modulation
(120.2230) Instrumentation, measurement, and metrology : Fabry-Perot
(130.3990) Integrated optics : Micro-optical devices

ToC Category:
Sensors

History
Original Manuscript: July 11, 2013
Revised Manuscript: August 19, 2013
Manuscript Accepted: August 19, 2013
Published: September 9, 2013

Virtual Issues
Vol. 8, Iss. 10 Virtual Journal for Biomedical Optics

Citation
Cheng Pang, Hyungdae Bae, Ashwani Gupta, Kenneth Bryden, and Miao Yu, "MEMS Fabry-Perot sensor interrogated by optical system-on-a-chip for simultaneous pressure and temperature sensing," Opt. Express 21, 21829-21839 (2013)
http://www.opticsinfobase.org/vjbo/abstract.cfm?URI=oe-21-19-21829


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