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Virtual Journal for Biomedical Optics

Virtual Journal for Biomedical Optics


  • Editors: Andrew Dunn and Anthony Durkin
  • Vol. 9, Iss. 5 — Apr. 29, 2014

Spectroscopic measurement of absorptive thin films by Spectral-Domain Optical Coherence Tomography

Tuan-Shu Ho, Pochi Yeh, Cheng-Chung Tsai, Kuang-Yu Hsu, and Sheng-Lung Huang  »View Author Affiliations

Optics Express, Vol. 22, Issue 5, pp. 5675-5683 (2014)

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A non-invasive method for measuring the refractive index, extinction coefficient and film thickness of absorptive thin films using spectral-domain optical coherent tomography is proposed, analyzed and experimentally demonstrated. Such an optical system employing a normal-incident beam of light exhibits a high spatial resolution. There are no mechanical moving parts involved for the measurement except the transversal scanning module for the measurement at various transversal locations. The method was experimentally demonstrated on two absorptive thin-film samples coated on transparent glass substrates. The refractive index and extinction coefficient spectra from 510 to 580 nm wavelength range and film thickness were simultaneously measured. The results are presented and discussed.

© 2014 Optical Society of America

OCIS Codes
(110.4500) Imaging systems : Optical coherence tomography
(310.3840) Thin films : Materials and process characterization

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: July 24, 2013
Revised Manuscript: February 22, 2014
Manuscript Accepted: February 27, 2014
Published: March 5, 2014

Virtual Issues
Vol. 9, Iss. 5 Virtual Journal for Biomedical Optics

Tuan-Shu Ho, Pochi Yeh, Cheng-Chung Tsai, Kuang-Yu Hsu, and Sheng-Lung Huang, "Spectroscopic measurement of absorptive thin films by Spectral-Domain Optical Coherence Tomography," Opt. Express 22, 5675-5683 (2014)

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