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Virtual Journal for Biomedical Optics

Virtual Journal for Biomedical Optics


  • Editors: Andrew Dunn and Anthony Durkin
  • Vol. 9, Iss. 5 — Apr. 29, 2014

At-wavelength metrology of hard X-ray mirror using near field speckle

Sebastien Berujon, Hongchang Wang, Simon Alcock, and Kawal Sawhney  »View Author Affiliations

Optics Express, Vol. 22, Issue 6, pp. 6438-6446 (2014)

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We present a method to measure the surface profile of hard X-ray reflective optics with nanometer height accuracy and sub-millimetre lateral resolution. The technique uses X-ray near-field speckle, generated by a scattering membrane translated using a piezo motor, to infer the deflection of X-rays from the surface. The method provides a nano-radian order accuracy on the mirror slopes in both the tangential and sagittal directions. As a demonstration, a pair of focusing mirrors mounted in a Kirkpatrick-Baez (KB) configuration were characterized and the results were in good agreement with offline metrology data. It is hoped that the new technique will provide feedback to optic manufacturers to improve mirror fabrication and be useful for the online optimization of active, nano-focusing mirrors on modern synchrotron beamlines.

© 2014 Optical Society of America

OCIS Codes
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure
(340.0340) X-ray optics : X-ray optics
(340.7470) X-ray optics : X-ray mirrors
(120.6165) Instrumentation, measurement, and metrology : Speckle interferometry, metrology

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: November 18, 2013
Revised Manuscript: January 26, 2014
Manuscript Accepted: January 27, 2014
Published: March 12, 2014

Virtual Issues
Vol. 9, Iss. 5 Virtual Journal for Biomedical Optics

Sebastien Berujon, Hongchang Wang, Simon Alcock, and Kawal Sawhney, "At-wavelength metrology of hard X-ray mirror using near field speckle," Opt. Express 22, 6438-6446 (2014)

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  1. S. Berujon, At-Wavelength Metrology of Hard X-Ray Synchrotron Beams and Optics (University of Grenoble, Online, 2013).
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