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Virtual Journal for Biomedical Optics

Virtual Journal for Biomedical Optics


  • Editor: Gregory W. Faris
  • Vol. 2, Iss. 1 — Jan. 19, 2007

Nanometer-scale ablation with a table-top soft x-ray laser

G. Vaschenko, A. Garcia Etxarri, C. S. Menoni, J. J. Rocca, O. Hemberg, S. Bloom, W. Chao, E. H. Anderson, D. T. Attwood, Y. Lu, and B. Parkinson  »View Author Affiliations

Optics Letters, Vol. 31, Issue 24, pp. 3615-3617 (2006)

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Ablation of holes with diameters as small as 82 nm and very clean walls was obtained in poly(methyl methacrylate) focusing pulses from a Ne-like Ar 46.9 nm compact capillary-discharge laser with a freestanding Fresnel zone plate diffracting into third order. These results demonstrate the feasibility of using focused soft x-ray laser beams for the direct nanoscale patterning of materials and the development of new nanoprobes.

© 2006 Optical Society of America

OCIS Codes
(140.3390) Lasers and laser optics : Laser materials processing
(140.7240) Lasers and laser optics : UV, EUV, and X-ray lasers
(310.3840) Thin films : Materials and process characterization

ToC Category:
Lasers and Laser Optics

Original Manuscript: July 20, 2006
Manuscript Accepted: September 7, 2006
Published: November 22, 2006

Virtual Issues
Vol. 2, Iss. 1 Virtual Journal for Biomedical Optics

G. Vaschenko, A. Garcia Etxarri, C. S. Menoni, J. J. Rocca, O. Hemberg, S. Bloom, W. Chao, E. H. Anderson, D. T. Attwood, Y. Lu, and B. Parkinson, "Nanometer-scale ablation with a table-top soft x-ray laser," Opt. Lett. 31, 3615-3617 (2006)

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