A new, optically addressed deformable mirror device is demonstrated. The device consists of a pixellated metalized polymeric membrane mirror supported above an optically addressed photoconductive substrate. A conductive transparent ZnO layer is deposited on the back side of the substrate. A very high-frequency AC bias is applied between the membrane and the back electrode of the device. The membrane is deformed when the back of the device is illuminated because of impedance and bias redistribution between two cascaded impedances. We fabricated, demonstrated, and modeled the operation of this device.
© 2006 Optical Society of America
Original Manuscript: August 17, 2005
Revised Manuscript: December 6, 2005
Manuscript Accepted: December 7, 2005
Vol. 1, Iss. 4 Virtual Journal for Biomedical Optics
J. Khoury, A. Drehman, C. L. Woods, B. Haji-Saeed, S. K. Sengupta, W. Goodhue, and J. Kierstead, "Optically driven microelectromechanical-system deformable mirror under high-frequency AC bias," Opt. Lett. 31, 808-810 (2006)