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Virtual Journal for Biomedical Optics

Virtual Journal for Biomedical Optics

| EXPLORING THE INTERFACE OF LIGHT AND BIOMEDICINE

  • Editor: Gregory W. Faris
  • Vol. 3, Iss. 11 — Oct. 22, 2008

Through-focus scanning-optical-microscope imaging method for nanoscale dimensional analysis

Ravikiran Attota, Thomas A. Germer, and Richard M. Silver  »View Author Affiliations


Optics Letters, Vol. 33, Issue 17, pp. 1990-1992 (2008)
http://dx.doi.org/10.1364/OL.33.001990


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Abstract

We present a novel optical technique that produces nanometer dimensional measurement sensitivity using a conventional bright-field optical microscope, by analyzing through-focus scanning-optical-microscope images obtained at different focus positions. In principle, this technique can be used to identify which dimension is changing between two nanosized targets and to determine the dimension using a library-matching method. This methodology has potential utility for a wide range of target geometries and application areas, including nanometrology, nanomanufacturing, semiconductor process control, and biotechnology.

© 2008 Optical Society of America

OCIS Codes
(100.6640) Image processing : Superresolution
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.4630) Instrumentation, measurement, and metrology : Optical inspection
(180.5810) Microscopy : Scanning microscopy
(150.1835) Machine vision : Defect understanding
(150.5495) Machine vision : Process monitoring and control

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: May 30, 2008
Manuscript Accepted: June 23, 2008
Published: August 27, 2008

Virtual Issues
Vol. 3, Iss. 11 Virtual Journal for Biomedical Optics

Citation
Ravikiran Attota, Thomas A. Germer, and Richard M. Silver, "Through-focus scanning-optical-microscope imaging method for nanoscale dimensional analysis," Opt. Lett. 33, 1990-1992 (2008)
http://www.opticsinfobase.org/vjbo/abstract.cfm?URI=ol-33-17-1990


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References

  1. Instrumentation and Metrology for Nanotechnology, Report of the National Nanotechnology Initiative (2004), http://www.nano.gov/NNI_Instrumentation_Metrology_rpt.pdf.
  2. W. Lojkowski, R. Turan, A. Proykova, and A. Daniszewska, Nanometrology. Eighth Nanoforum Report (Nanoforum, 2006), http://www.innovationsgesellschaft.ch/images/fremde_publikationen/NANOMETROLOGY_Report.pdf.
  3. H. Schwenke, U. Neuschaefer-Rube, T. Pfeifer, and H. Kunzmann, Optical Methods for Dimensional Metrology in Production Engineering: Annals of the CIRP (Elsevier, 2002), Vol. 51, pp. 685-698.
  4. R. M. Silver, R. Attota, M. Stocker, M. Bishop, J. Jun, E. Marx, M. Davidson, and R. Larrabee, Proc. SPIE 5375, 78 (2004). [CrossRef]
  5. R. Attota, R. M. Silver, and J. Potzick, Proc. SPIE 6289, 62890Q-1 (2006).
  6. R. Attota, R. M. Silver, and R. G. Dixson, Appl. Opt. 47, 495 (2008). [CrossRef] [PubMed]
  7. R. Attota, R. M. Silver, and B. M. Barnes, Proc. SPIE 6922, 6922OE (2008).
  8. M. Davidson, Microelectron. Eng. 13, 523 (1991). [CrossRef]
  9. T. V. Pistor, Ph.D. thesis, Memorandum UCB/ERL M01/19 (University of California at Berkeley, 2001).
  10. T. A. Germer and E. Marx, Proc. SPIE 6152, 61520I1 (2006).
  11. R. M. Silver, B. M. Barnes, R. Attota, J. Jun, M. Stocker, E. Marx, and H. J. Patrick, Appl. Opt. 46, 4248 (2007). [CrossRef] [PubMed]
  12. R. M. Silver, B. M. Barnes, A. Heckert, R. Attota, R. Dixson, and J. Jun, Proc. SPIE 6922, 69221M (2008). [CrossRef]

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