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Characterization of roughness parameters of metallic surfaces using terahertz reflection spectra

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Abstract

This paper reports on the effect of random Gaussian roughness with rms roughness values of 520μm on the terahertz reflection spectra of metallic aluminum surfaces using Fourier transform IR spectroscopy. By comparing experimental data with a theoretical model based on the Kirchhoff approximation, the rms roughness of a surface is accurately determined. The rms roughness determined by this method is in good agreement with the rms roughness measured using a stylus surface profilometer. In addition, we demonstrate that this method can be used to clearly resolve rough surfaces that differ in rms roughness by approximately 1μm.

© 2009 Optical Society of America

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