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Virtual Journal for Biomedical Optics

Virtual Journal for Biomedical Optics


  • Editor: Gregory W. Faris
  • Vol. 4, Iss. 13 — Dec. 2, 2009

Wide-field optical nanoprofilometry using structured illumination

Chun-Chieh Wang, Kuang-Li Lee, and Chau-Hwang Lee  »View Author Affiliations

Optics Letters, Vol. 34, Issue 22, pp. 3538-3540 (2009)

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We combine the differential height measurement concept with structured illumination microscopy to develop wide-field optical nanoprofilometry. Sub-diffraction-limit lateral resolution and axially sectioning imaging are achieved with structured illumination using a liquid-crystal spatial light modulator. As the sample surface is placed into the linear region of the sectioning axial response curve, the signal change owing to topographic variations provides nanometer depth sensitivity. The lateral resolution and the depth profiling accuracy are about 0.3 wavelengths and 6 nm, respectively. Depth profiling on solid-state specimens and label-free superresolution imaging of living cells are demonstrated.

© 2009 Optical Society of America

OCIS Codes
(110.4850) Imaging systems : Optical transfer functions
(120.6660) Instrumentation, measurement, and metrology : Surface measurements, roughness
(180.6900) Microscopy : Three-dimensional microscopy

ToC Category:
Imaging Systems

Original Manuscript: August 4, 2009
Revised Manuscript: September 24, 2009
Manuscript Accepted: October 7, 2009
Published: November 11, 2009

Virtual Issues
Vol. 4, Iss. 13 Virtual Journal for Biomedical Optics

Chun-Chieh Wang, Kuang-Li Lee, and Chau-Hwang Lee, "Wide-field optical nanoprofilometry using structured illumination," Opt. Lett. 34, 3538-3540 (2009)

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