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Virtual Journal for Biomedical Optics

Virtual Journal for Biomedical Optics


  • Editor: Gregory W. Faris
  • Vol. 4, Iss. 4 — Apr. 1, 2009

Soft x-ray microscope constructed with a PMMA phase-reversal zone plate

Jong Ju Park, Deuk Su Kim, Sang Chul Jeon, Juyun Park, Kyoung Hwan Lee, Jae-hwan Lee, Ki Nam Kim, Jung Jae Yoo, and Chang Hee Nam  »View Author Affiliations

Optics Letters, Vol. 34, Issue 3, pp. 235-237 (2009)

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A soft x-ray microscope based on a phase-reversal zone plate was constructed and tested using high harmonic radiation as a coherent light source. The 61st harmonic centered at 13.3 nm was optimized in spectral sharpness and intensity by controlling the incident laser energy and chirp. A phase-reversal zone plate made of polymethyl methacrylate more than doubled the first-order efficiency. The nano patterns, imaged on an x-ray CCD with a magnification of 650, showed that the measured resolution of the microscope was better than 100 nm .

© 2009 Optical Society of America

OCIS Codes
(180.7460) Microscopy : X-ray microscopy
(340.7480) X-ray optics : X-rays, soft x-rays, extreme ultraviolet (EUV)
(050.1965) Diffraction and gratings : Diffractive lenses

ToC Category:

Original Manuscript: October 9, 2008
Revised Manuscript: December 2, 2008
Manuscript Accepted: December 8, 2008
Published: January 21, 2009

Virtual Issues
Vol. 4, Iss. 4 Virtual Journal for Biomedical Optics

Jong Ju Park, Deuk Su Kim, Sang Chul Jeon, Juyun Park, Kyoung Hwan Lee, Jae-hwan Lee, Ki Nam Kim, Jung Jae Yoo, and Chang Hee Nam, "Soft x-ray microscope constructed with a PMMA phase-reversal zone plate," Opt. Lett. 34, 235-237 (2009)

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