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Virtual Journal for Biomedical Optics

Virtual Journal for Biomedical Optics

| EXPLORING THE INTERFACE OF LIGHT AND BIOMEDICINE

  • Editor: Gregory W. Faris
  • Vol. 4, Iss. 4 — Apr. 1, 2009

Soft x-ray microscope constructed with a PMMA phase-reversal zone plate

Jong Ju Park, Deuk Su Kim, Sang Chul Jeon, Juyun Park, Kyoung Hwan Lee, Jae-hwan Lee, Ki Nam Kim, Jung Jae Yoo, and Chang Hee Nam  »View Author Affiliations


Optics Letters, Vol. 34, Issue 3, pp. 235-237 (2009)
http://dx.doi.org/10.1364/OL.34.000235


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Abstract

A soft x-ray microscope based on a phase-reversal zone plate was constructed and tested using high harmonic radiation as a coherent light source. The 61st harmonic centered at 13.3 nm was optimized in spectral sharpness and intensity by controlling the incident laser energy and chirp. A phase-reversal zone plate made of polymethyl methacrylate more than doubled the first-order efficiency. The nano patterns, imaged on an x-ray CCD with a magnification of 650, showed that the measured resolution of the microscope was better than 100 nm .

© 2009 Optical Society of America

OCIS Codes
(180.7460) Microscopy : X-ray microscopy
(340.7480) X-ray optics : X-rays, soft x-rays, extreme ultraviolet (EUV)
(050.1965) Diffraction and gratings : Diffractive lenses

ToC Category:
Microscopy

History
Original Manuscript: October 9, 2008
Revised Manuscript: December 2, 2008
Manuscript Accepted: December 8, 2008
Published: January 21, 2009

Virtual Issues
Vol. 4, Iss. 4 Virtual Journal for Biomedical Optics

Citation
Jong Ju Park, Deuk Su Kim, Sang Chul Jeon, Juyun Park, Kyoung Hwan Lee, Jae-hwan Lee, Ki Nam Kim, Jung Jae Yoo, and Chang Hee Nam, "Soft x-ray microscope constructed with a PMMA phase-reversal zone plate," Opt. Lett. 34, 235-237 (2009)
http://www.opticsinfobase.org/vjbo/abstract.cfm?URI=ol-34-3-235


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References

  1. G. Denbeaux, E. Anderson, W. Chao, T. Eimüller, L. Johnson, M. Köhler, C. Larabell, M. Legros, P. Fischer, A. Pearson, G. Schütz, D. Yager, and D. Attwood, Nucl. Instrum. Methods Phys. Res. A 467-468, 841 (2001). [CrossRef]
  2. P. A. C. Takman, H. Stollberg, G. A. Johansson, A. Holmberg, M. Lindblom, and H. M. Hertz, J. Microsc. 226, 175 (2007). [CrossRef] [PubMed]
  3. G. Vaschenko, C. Brewer, F. Brizuela, Y. Wang, M. A. Larotonda, B. M. Luther, M. C. Marconi, J. J. Rocca, C. S. Menoni, E. H. Anderson, W. Chao, B. D. Harteneck, J. A. Liddle, Y. Liu, and D. T. Attwood, Opt. Lett. 31, 1214 (2006). [CrossRef] [PubMed]
  4. M. Wieland, Ch. Spielmann, U. Kleineberg, Th. Westerwalbesloh, U. Heinzmann, and T. Wilhein, Ultramicroscopy 102, 93 (2005). [CrossRef]
  5. D. G. Lee, J. J. Park, J. H. Sung, and C. H. Nam, Opt. Lett. 28, 480 (2003). [CrossRef] [PubMed]
  6. K. T. Kim, K. S. Kang, M. N. Park, T. Imran, G. Umesh, and C. H. Nam, Phys. Rev. Lett. 99, 223904 (2007). [CrossRef]
  7. E. Gouliemakis, M. Schultze, M. Hofstetter, V. S. Yakovlev, J. Gagnon, M. Uiberacker, A. L. Aquila, E. M. Gullikson, D. T. Attwood, R. Kienberger, F. Krausz, and U. Kleineberg, Science 320, 1614 (2008). [CrossRef]
  8. J. Kirz, J. Opt. Soc. Am. 64, 301 (1974). [CrossRef]
  9. H.-Y. Tsai, H. I. Smith, and R. Menon, J. Vac. Sci. Technol. B 25, 2068 (2007). [CrossRef]
  10. http://www-cxro.lbl.gov/optical_constants/.
  11. A. R. Jones, Br. J. Appl. Phys. 2, 1789 (1969).
  12. D. Attwood, Soft X-Rays and Extreme Ultraviolet Radiation: Principles and Applications (Cambridge U. Press, 1999), Chap. 9.
  13. H. T. Kim, D. G. Lee, K.-H. Hong, J.-H. Kim, I. W. Choi, and C. H. Nam, Phys. Rev. A 67, 051801(R) (2003). [CrossRef]
  14. D. S. Kim, J. J. Park, K. H. Lee, J. Park, and C. H. Nam, “Soft x-ray microscope constructed with 130-nm spatial resolution using a high harmonic x-ray source,” Jpn. J. Appl. Phys. (to be published).

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