Silicon based total internal reflection bio and chemical sensing with spectral phase detection
Optics Express, Vol. 17, Issue 23, pp. 20847-20852 (2009)
http://dx.doi.org/10.1364/OE.17.020847
Acrobat PDF (192 KB)
Abstract
Si-based total internal reflection (TIR) bio/chemical sensor presents an attractive alternative to Surface Plasmon Resonance (SPR) technology due to a relatively simple optical arrangement and technological implementation, as well as a relatively easy bio/chemical immobilization on Si/SiO2 surface with a number of novel attractive applications. This sensor is based on the control of phase difference between p- and s-polarized components of light reflected from Si/air or Si/water interface in TIR geometry and a high sensitivity of the sensor is granted by a high refractive index of Si (3.56 at 1200 nm). We study properties of TIR sensors in a configuration of spectral phase detection and identify conditions of maximal phase sensitive response. We also experimentally show that the detection limit of Si-based TIR sensor can be lowered down to a level of detection of commercially available SPR devices (10−6 Refractive Index Units, RIU) under the use of a proper low-noisy method of the phase control. The concept of Si-based TIR opens attractive prospects for the miniaturization of sensor devices, taking advantage of the advanced state of development of Si-based microfabrication technologies, while the proposed spectral phase detection scheme offers much easier packaging and calibration steps
© 2009 OSA
1. Introduction
W. Lukosz, “Integrated optical direct chemical and biochemical sensors,” Sens. Act. B. 29(1-3), 37–50 ( 1995). [CrossRef]
M. Espinosa Bosch, A. J. R. Sanchez, F. Sachez Rojas, and C. Bosch Ojeda, “Recent Development in Optical Fiber Biosensors,” Sensors 7, 797–859 ( 2007). [CrossRef]
B. Liedberg, C. Nylander, and I. Lundstrum, “Surface plasmon resonance for gas detection and biosensing,” Sens. Act. B Chem. 4(1), 299–304 ( 1983). [CrossRef]
B. Liedberg, C. Nylander, and I. Lundstrum, “Surface plasmon resonance for gas detection and biosensing,” Sens. Act. B Chem. 4(1), 299–304 ( 1983). [CrossRef]
A. V. Kabashin and P. I. Nikitin, “Interferometer based on a surface-plasmon resonance for sensor applications,” Quantum Electron. 27(7), 653–654 ( 1997). [CrossRef]
S. Y. Wu, H. P. Ho, W. C. Law, C. Lin, and S. K. Kong, “Highly sensitive differential phase-sensitive surface plasmon resonance biosensor based on the Mach-Zehnder configuration,” Opt. Lett. 29(20), 2378–2380 ( 2004). [CrossRef] [PubMed]
P. P. Markowicz, W. C. Law, A. Baev, P. Prasad, S. Patskovsky, and A. V. Kabashin, “Phase-sensitive time-modulated SPR polarimetry for wide dynamic range biosensing,” Opt. Express 15, 1745 ( 2007). [CrossRef] [PubMed]
S. Patskovsky, M. Maisonneuve, M. Meunier, and A. V. Kabashin, “Mechanical modulation method for ultrasensitive phase measurements in photonics biosensing,” Opt. Express 16(26), 21305–21314 ( 2008). [CrossRef] [PubMed]
S. Patskovsky, M. Meunier, and A. V. Kabashin, “Phase-sensitive silicon-based total internal reflection sensor,” Opt. Express 15(19), 12523–12528 ( 2007). [CrossRef] [PubMed]
S. Patskovsky, M. Meunier, and A. V. Kabashin, “Phase-sensitive silicon-based total internal reflection sensor,” Opt. Express 15(19), 12523–12528 ( 2007). [CrossRef] [PubMed]
2. Calculation results
R. M. A. Azzam, “Phase shifts that accompany total internal reflection at a dielectric-dielectric interface,” J. Opt. Soc. Am. A 21(8), 1559–1563 ( 2004). [CrossRef]
S. Patskovsky, M. Meunier, and A. V. Kabashin, “Phase-sensitive silicon-based total internal reflection sensor,” Opt. Express 15(19), 12523–12528 ( 2007). [CrossRef] [PubMed]
S. Patskovsky, M. Meunier, and A. V. Kabashin, “Phase-sensitive silicon-based total internal reflection sensor,” Opt. Express 15(19), 12523–12528 ( 2007). [CrossRef] [PubMed]
R. M. A. Azzam, “Phase shifts that accompany total internal reflection at a dielectric-dielectric interface,” J. Opt. Soc. Am. A 21(8), 1559–1563 ( 2004). [CrossRef]
3. Measurements results
S. Patskovsky, M. Meunier, and A. V. Kabashin, “Phase-sensitive silicon-based total internal reflection sensor,” Opt. Express 15(19), 12523–12528 ( 2007). [CrossRef] [PubMed]
W.-C. Law, P. Markowicz, K.-T. Yong, I. Roy, A. Baev, S. Patskovsky, A. V. Kabashin, H. P. Ho, and P. N. Prasad, “Wide dynamic range phase-sensitive surface plasmon resonance biosensor based on measuring the modulation harmonics,” Biosens. Bioelectron. 23(5), 627–632 ( 2007). [CrossRef] [PubMed]
M.W. Wang, F.H. Tsai, and Y.F. Chao “In situ calibration technique for photoelastic modulator in ellipsometry,” Thin Solid Films 455 –456 78–83 ( 2004). [CrossRef]
A. V. Kabashin and P. I. Nikitin, “Interferometer based on a surface-plasmon resonance for sensor applications,” Quantum Electron. 27(7), 653–654 ( 1997). [CrossRef]
C. E. Stewart, I. R. Hooper, and J. R. Sambles, “Surface plasmon differential ellipsometry of aqueous solutions for bio-chemical sensing,” J. Phys. D Appl. Phys. 41(10), 105408–105415 ( 2008). [CrossRef]
S. Patskovsky, A. V. Kabashin, M. Meunier, and J. H. T. Luong, “Near-infrared surface plasmon resonance sensing on a silicon platform,” Sens. Actuators B Chem. 97(2-3), 409–414 ( 2004). [CrossRef]
S. Patskovsky, A. V. Kabashin, M. Meunier, and J. H. T. Luong, “Silicon-based surface plasmon resonance sensing with two surface plasmon polariton modes,” Appl. Opt. 42(34), 6905–6909 ( 2003). [CrossRef] [PubMed]
S. Patskovsky, A. V. Kabashin, M. Meunier, and J. H. T. Luong, “Near-infrared surface plasmon resonance sensing on a silicon platform,” Sens. Actuators B Chem. 97(2-3), 409–414 ( 2004). [CrossRef]
S. Patskovsky, A. V. Kabashin, M. Meunier, and J. H. T. Luong, “Silicon-based surface plasmon resonance sensing with two surface plasmon polariton modes,” Appl. Opt. 42(34), 6905–6909 ( 2003). [CrossRef] [PubMed]
4. Conclusion
Acknowledgements
References and links
P. N. Prasad, Introduction to Biophotonics, Wiley-Interscience (2003). | |
“Handbook of Surface Plasmon Resonance”, Eds: R. B. M. Schasfoort, A. J. Tudos, Royal Society of Chemistry (2008). | |
G. Harsanyi, Polymer Films In Sensor Applications (CRC Press 1995). | |
W. Lukosz, “Integrated optical direct chemical and biochemical sensors,” Sens. Act. B. 29(1-3), 37–50 ( 1995). [CrossRef] | |
M. Espinosa Bosch, A. J. R. Sanchez, F. Sachez Rojas, and C. Bosch Ojeda, “Recent Development in Optical Fiber Biosensors,” Sensors 7, 797–859 ( 2007). [CrossRef] | |
B. Liedberg, C. Nylander, and I. Lundstrum, “Surface plasmon resonance for gas detection and biosensing,” Sens. Act. B Chem. 4(1), 299–304 ( 1983). [CrossRef] | |
B. Liedberg, C. Nylander, and I. Lundström, “Biosensing with surface plasmon resonance--how it all started,” Biosens. Bioelectron. 10(8), i–ix ( 1995). [CrossRef] [PubMed] | |
A. V. Kabashin and P. I. Nikitin, “Interferometer based on a surface-plasmon resonance for sensor applications,” Quantum Electron. 27(7), 653–654 ( 1997). [CrossRef] | |
A. N. Grigorenko, P. I. Nikitin, and A. V. Kabashin, “Phase Jumps and Interferometric Surface Plasmon Resonance Imaging,” Appl. Phys. Lett. 75(25), 3917–3919 ( 1999). [CrossRef] | |
S. Y. Wu, H. P. Ho, W. C. Law, C. Lin, and S. K. Kong, “Highly sensitive differential phase-sensitive surface plasmon resonance biosensor based on the Mach-Zehnder configuration,” Opt. Lett. 29(20), 2378–2380 ( 2004). [CrossRef] [PubMed] | |
P. P. Markowicz, W. C. Law, A. Baev, P. Prasad, S. Patskovsky, and A. V. Kabashin, “Phase-sensitive time-modulated SPR polarimetry for wide dynamic range biosensing,” Opt. Express 15, 1745 ( 2007). [CrossRef] [PubMed] | |
S. Patskovsky, M. Maisonneuve, M. Meunier, and A. V. Kabashin, “Mechanical modulation method for ultrasensitive phase measurements in photonics biosensing,” Opt. Express 16(26), 21305–21314 ( 2008). [CrossRef] [PubMed] | |
S. Patskovsky, M. Meunier, and A. V. Kabashin, “Phase-sensitive silicon-based total internal reflection sensor,” Opt. Express 15(19), 12523–12528 ( 2007). [CrossRef] [PubMed] | |
M. Born, and E. Wolf, Principles of Optics (Pergamon, New York, 1975). | |
R. M. A. Azzam, “Differential reflection phase shift under conditions of attenuated internal reflection,” JOSA A Vol. 16 Iss. 7, (1999) | |
R. M. A. Azzam, “Phase shifts that accompany total internal reflection at a dielectric-dielectric interface,” J. Opt. Soc. Am. A 21(8), 1559–1563 ( 2004). [CrossRef] | |
W.-C. Law, P. Markowicz, K.-T. Yong, I. Roy, A. Baev, S. Patskovsky, A. V. Kabashin, H. P. Ho, and P. N. Prasad, “Wide dynamic range phase-sensitive surface plasmon resonance biosensor based on measuring the modulation harmonics,” Biosens. Bioelectron. 23(5), 627–632 ( 2007). [CrossRef] [PubMed] | |
M.W. Wang, F.H. Tsai, and Y.F. Chao “In situ calibration technique for photoelastic modulator in ellipsometry,” Thin Solid Films 455 –456 78–83 ( 2004). [CrossRef] | |
C. E. Stewart, I. R. Hooper, and J. R. Sambles, “Surface plasmon differential ellipsometry of aqueous solutions for bio-chemical sensing,” J. Phys. D Appl. Phys. 41(10), 105408–105415 ( 2008). [CrossRef] | |
S. Patskovsky, A. V. Kabashin, M. Meunier, and J. H. T. Luong, “Near-infrared surface plasmon resonance sensing on a silicon platform,” Sens. Actuators B Chem. 97(2-3), 409–414 ( 2004). [CrossRef] | |
S. Patskovsky, A. V. Kabashin, M. Meunier, and J. H. T. Luong, “Silicon-based surface plasmon resonance sensing with two surface plasmon polariton modes,” Appl. Opt. 42(34), 6905–6909 ( 2003). [CrossRef] [PubMed] |
OCIS Codes
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(240.2130) Optics at surfaces : Ellipsometry and polarimetry
ToC Category:
Sensors
History
Original Manuscript: September 9, 2009
Revised Manuscript: October 22, 2009
Manuscript Accepted: October 23, 2009
Published: October 30, 2009
Virtual Issues
Vol. 4, Iss. 13 Virtual Journal for Biomedical Optics
Citation
Sergiy Patskovsky, In-Hyouk Song, Michel Meunier, and Andrei V. Kabashin, "Silicon based total internal reflection bio and chemical sensing with spectral phase detection," Opt. Express 17, 20847-20852 (2009)
http://www.opticsinfobase.org/vjbo/abstract.cfm?URI=oe-17-23-20847
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References
- P. N. Prasad, Introduction to Biophotonics, Wiley-Interscience (2003).
- “Handbook of Surface Plasmon Resonance”, Eds: R. B. M. Schasfoort, A. J. Tudos, Royal Society of Chemistry (2008).
- G. Harsanyi, Polymer Films In Sensor Applications (CRC Press 1995).
- W. Lukosz, “Integrated optical direct chemical and biochemical sensors,” Sens. Act. B. 29(1-3), 37–50 (1995). [CrossRef]
- M. Espinosa Bosch, A. J. R. Sanchez, F. Sachez Rojas, and C. Bosch Ojeda, “Recent Development in Optical Fiber Biosensors,” Sensors 7, 797–859 (2007). [CrossRef]
- B. Liedberg, C. Nylander, and I. Lundstrum, “Surface plasmon resonance for gas detection and biosensing,” Sens. Act. B Chem. 4(1), 299–304 (1983). [CrossRef]
- B. Liedberg, C. Nylander, and I. Lundström, “Biosensing with surface plasmon resonance--how it all started,” Biosens. Bioelectron. 10(8), i–ix (1995). [CrossRef] [PubMed]
- www.biacore.com
- A. V. Kabashin and P. I. Nikitin, “Interferometer based on a surface-plasmon resonance for sensor applications,” Quantum Electron. 27(7), 653–654 (1997). [CrossRef]
- A. N. Grigorenko, P. I. Nikitin, and A. V. Kabashin, “Phase Jumps and Interferometric Surface Plasmon Resonance Imaging,” Appl. Phys. Lett. 75(25), 3917–3919 (1999). [CrossRef]
- S. Y. Wu, H. P. Ho, W. C. Law, C. Lin, and S. K. Kong, “Highly sensitive differential phase-sensitive surface plasmon resonance biosensor based on the Mach-Zehnder configuration,” Opt. Lett. 29(20), 2378–2380 (2004). [CrossRef] [PubMed]
- P. P. Markowicz, W. C. Law, A. Baev, P. Prasad, S. Patskovsky, and A. V. Kabashin, “Phase-sensitive time-modulated SPR polarimetry for wide dynamic range biosensing,” Opt. Express 15, 1745 (2007). [CrossRef] [PubMed]
- S. Patskovsky, M. Maisonneuve, M. Meunier, and A. V. Kabashin, “Mechanical modulation method for ultrasensitive phase measurements in photonics biosensing,” Opt. Express 16(26), 21305–21314 (2008). [CrossRef] [PubMed]
- S. Patskovsky, M. Meunier, and A. V. Kabashin, “Phase-sensitive silicon-based total internal reflection sensor,” Opt. Express 15(19), 12523–12528 (2007). [CrossRef] [PubMed]
- M. Born, and E. Wolf, Principles of Optics (Pergamon, New York, 1975).
- R. M. A. Azzam, “Differential reflection phase shift under conditions of attenuated internal reflection,” JOSA A Vol. 16 Iss. 7, (1999)
- R. M. A. Azzam, “Phase shifts that accompany total internal reflection at a dielectric-dielectric interface,” J. Opt. Soc. Am. A 21(8), 1559–1563 (2004). [CrossRef]
- W.-C. Law, P. Markowicz, K.-T. Yong, I. Roy, A. Baev, S. Patskovsky, A. V. Kabashin, H. P. Ho, and P. N. Prasad, “Wide dynamic range phase-sensitive surface plasmon resonance biosensor based on measuring the modulation harmonics,” Biosens. Bioelectron. 23(5), 627–632 (2007). [CrossRef] [PubMed]
- M.W. Wang, F.H. Tsai, and Y.F. Chao “In situ calibration technique for photoelastic modulator in ellipsometry,” Thin Solid Films 455 –456 78–83 (2004). [CrossRef]
- C. E. Stewart, I. R. Hooper, and J. R. Sambles, “Surface plasmon differential ellipsometry of aqueous solutions for bio-chemical sensing,” J. Phys. D Appl. Phys. 41(10), 105408–105415 (2008). [CrossRef]
- www.luxpop.com
- S. Patskovsky, A. V. Kabashin, M. Meunier, and J. H. T. Luong, “Near-infrared surface plasmon resonance sensing on a silicon platform,” Sens. Actuators B Chem. 97(2-3), 409–414 (2004). [CrossRef]
- S. Patskovsky, A. V. Kabashin, M. Meunier, and J. H. T. Luong, “Silicon-based surface plasmon resonance sensing with two surface plasmon polariton modes,” Appl. Opt. 42(34), 6905–6909 (2003). [CrossRef] [PubMed]
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