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Applied Optics

Applied Optics


  • Vol. 38, Iss. 19 — Jul. 1, 1999
  • pp: 4065–4073

Separation of measurement of the refractive index and the geometrical thickness by use of a wavelength-scanning interferometer with a confocal microscope

Takashi Fukano and Ichirou Yamaguchi  »View Author Affiliations

Applied Optics, Vol. 38, Issue 19, pp. 4065-4073 (1999)

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An improved system for the separate measurement of the refractive index and the geometrical thickness that constitutes a hybrid configuration of a confocal microscope and a wavelength-scanning heterodyne interferometer with a laser diode is presented. The optical path difference can be measured in less than 1 s, which is 10 times quicker than with the low-coherence interferometry previously used, and with a resolution of 10 µm with a fixed reference mirror. Separate measurement of the refractive index and the geometrical thickness of glass plates was demonstrated by use of the arrangement in place of the low-coherence interferometer used previously.

© 1999 Optical Society of America

OCIS Codes
(040.2840) Detectors : Heterodyne
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.4630) Instrumentation, measurement, and metrology : Optical inspection
(170.6960) Medical optics and biotechnology : Tomography
(180.1790) Microscopy : Confocal microscopy

Original Manuscript: December 9, 1998
Revised Manuscript: April 5, 1999
Published: July 1, 1999

Takashi Fukano and Ichirou Yamaguchi, "Separation of measurement of the refractive index and the geometrical thickness by use of a wavelength-scanning interferometer with a confocal microscope," Appl. Opt. 38, 4065-4073 (1999)

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