OSA's Digital Library

Applied Optics

Applied Optics


  • Editor: Joseph N. Mait
  • Vol. 51, Iss. 13 — May. 1, 2012
  • pp: 2429–2435

Utilization of frequency information in a linear wavenumber-scanning interferometer for profile measurement of a thin film

Osami Sasaki, Satoshi Hirakubo, Samuel Choi, and Takamasa Suzuki  »View Author Affiliations

Applied Optics, Vol. 51, Issue 13, pp. 2429-2435 (2012)

View Full Text Article

Enhanced HTML    Acrobat PDF (520 KB)

Browse Journals / Lookup Meetings

Browse by Journal and Year


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools



The positions of the front and rear surfaces of a silicon dioxide film with 4 μm thickness is measured with a novel and simple method in which both amplitude and phase of a sinusoidal wave signal corresponding to one optical path difference of a reflecting surface is utilized in a linear wavenumber-scanning interferometer. For this utilization, the scanning width and the position of the reference mirror are adjusted exactly to distinguish the two sinusoidal waves corresponding to the two surfaces of the film. The scanning width of the wavenumber and wavelength of the light source are 0.326×103nm1 and 140 nm, respectively.

© 2012 Optical Society of America

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.4640) Instrumentation, measurement, and metrology : Optical instruments
(120.5060) Instrumentation, measurement, and metrology : Phase modulation
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: August 11, 2011
Revised Manuscript: March 10, 2012
Manuscript Accepted: March 16, 2012
Published: May 1, 2012

Osami Sasaki, Satoshi Hirakubo, Samuel Choi, and Takamasa Suzuki, "Utilization of frequency information in a linear wavenumber-scanning interferometer for profile measurement of a thin film," Appl. Opt. 51, 2429-2435 (2012)

Sort:  Author  |  Year  |  Journal  |  Reset  


  1. P. de Groot and L. Deck, “Three-dimensional imaging by sub-Nyquist sampling of white light interferograms,” Opt. Lett. 18, 1462–1464 (1993). [CrossRef]
  2. S. W. Kim and G. H. Kim, “Thickness-profile measurement of transparent thin-film layers by white-light scanning interferometry,” Appl. Opt. 38, 5968–5937 (1999). [CrossRef]
  3. U. Schnell, R. Dandliker, and S. Gray, “Dispersive white-light interferometry for absolute distance measurement with dielectric multilayer systems on the target,” Opt. Lett. 21, 528–530 (1996). [CrossRef]
  4. Y. S. Ghim and S. W. Kim, “Thin-film thickness profile and its refractive index measurements by dispersive white-light interferometry,” Opt. Express 14, 11885–11891 (2006). [CrossRef]
  5. D. Kim, S. Kim, H. J. Kong, and Y. Lee, “Measurement of the thickness profile of a transparent thin-film deposited upon a pattern structure with an acousto-optic tunable filter,” Opt. Lett. 27, 1893–1895 (2002). [CrossRef]
  6. D. Kim and S. Kim, “Direct spectral phase function calculation for dispersive interferometric thickness profilometry,” Opt. Express 12, 5117–5124 (2004). [CrossRef]
  7. H. Akiyama, O. Sasaki, and T. Suzuki, “Sinusoidal wavelength-scanning interferometer using an acousto-optic tunable filter for measurement of thickness and surface profile of a thin film,” Opt. Express 13, 10066–10074 (2005). [CrossRef]
  8. D. Kim, S. Kim, H. J. Kong, Y. Lee, and Y. K. Kwak, “Fast thickness profile measurement using a peak detection method based on an acousto-optic tunable filter,” Meas. Sci. Technol. 13, L1–L5 (2002). [CrossRef]
  9. J. W. You, S. Kim, and D. Kim, “High speed volumetric thickness profile measurement based on full-field wavelength scanning interferometer,” Opt. Express 16, 21022–21031 (2008). [CrossRef]
  10. J. W. You, D. Kim, S. Y. Ryu, and S. Kim, “Simultaneous measurement method of total and self-interference for the volumetric thickness profilometer,” Opt. Express 17, 1352–1360 (2009). [CrossRef]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited