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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Joseph N. Mait
  • Vol. 51, Iss. 16 — Jun. 1, 2012
  • pp: 3224–3227

Tungsten wire grid polarizer for applications in the DUV spectral range

Thomas Weber, Thomas Käsebier, Michael Helgert, Ernst-Bernhard Kley, and Andreas Tünnermann  »View Author Affiliations


Applied Optics, Vol. 51, Issue 16, pp. 3224-3227 (2012)
http://dx.doi.org/10.1364/AO.51.003224


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Abstract

In this paper, we present a broadband wire grid polarizer with a spectral working range down to a wavelength of 193 nm. Tungsten is chosen as grating material because it provides a high extinction ratio and transmission compared with other common grating materials. The fabrication of the grating with 100 nm period was accomplished using a spatial frequency doubling approach based on ultrafast electron beam lithography and a sophisticated deposition technique. At a wavelength of 193 nm, a transmission of about 44% and an extinction ratio of 20 was measured.

© 2012 Optical Society of America

OCIS Codes
(050.2770) Diffraction and gratings : Gratings
(230.5440) Optical devices : Polarization-selective devices
(220.4241) Optical design and fabrication : Nanostructure fabrication

ToC Category:
Diffraction and Gratings

History
Original Manuscript: January 23, 2012
Manuscript Accepted: January 26, 2012
Published: May 23, 2012

Citation
Thomas Weber, Thomas Käsebier, Michael Helgert, Ernst-Bernhard Kley, and Andreas Tünnermann, "Tungsten wire grid polarizer for applications in the DUV spectral range," Appl. Opt. 51, 3224-3227 (2012)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-51-16-3224


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References

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