In this paper, we present a broadband wire grid polarizer with a spectral working range down to a wavelength of 193 nm. Tungsten is chosen as grating material because it provides a high extinction ratio and transmission compared with other common grating materials. The fabrication of the grating with 100 nm period was accomplished using a spatial frequency doubling approach based on ultrafast electron beam lithography and a sophisticated deposition technique. At a wavelength of 193 nm, a transmission of about 44% and an extinction ratio of 20 was measured.
© 2012 Optical Society of America
Diffraction and Gratings
Original Manuscript: January 23, 2012
Manuscript Accepted: January 26, 2012
Published: May 23, 2012
Thomas Weber, Thomas Käsebier, Michael Helgert, Ernst-Bernhard Kley, and Andreas Tünnermann, "Tungsten wire grid polarizer for applications in the DUV spectral range," Appl. Opt. 51, 3224-3227 (2012)