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Optics Letters

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  • Vol. 36, Iss. 2 — Jan. 15, 2011
  • pp: 118–120

Fourier analysis for rotating-element ellipsometers

Yong Jai Cho, Won Chegal, and Hyun Mo Cho  »View Author Affiliations


Optics Letters, Vol. 36, Issue 2, pp. 118-120 (2011)
http://dx.doi.org/10.1364/OL.36.000118


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Abstract

We introduce a Fourier analysis of the waveform of periodic light-irradiance variation to capture Fourier coefficients for multichannel rotating-element ellipsometers. In this analysis, the Fourier coefficients for a sample are obtained using a discrete Fourier transform on the exposures. The analysis gives a generic function that encompasses the discrete Fourier transform or the Hadamard transform, depending on the specific conditions. Unlike the Hadamard transform, a well-known data acquisition method that is used only for conventional multichannel rotating-element ellipsometers with line arrays with specific readout-mode timing, this Fourier analysis is applicable to various line arrays with either nonoverlap or overlap readout-mode timing. To assess the effects of the novel Fourier analysis, the Fourier coefficients for a sample were measured with a custom-built rotating-polarizer ellipsometer, using this Fourier analysis with various numbers of scans, integration times, and rotational speeds of the polarizer.

© 2011 Optical Society of America

OCIS Codes
(120.2130) Instrumentation, measurement, and metrology : Ellipsometry and polarimetry
(120.3930) Instrumentation, measurement, and metrology : Metrological instrumentation
(120.4640) Instrumentation, measurement, and metrology : Optical instruments
(120.6200) Instrumentation, measurement, and metrology : Spectrometers and spectroscopic instrumentation

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: October 11, 2010
Revised Manuscript: November 25, 2010
Manuscript Accepted: November 26, 2010
Published: January 5, 2011

Citation
Yong Jai Cho, Won Chegal, and Hyun Mo Cho, "Fourier analysis for rotating-element ellipsometers," Opt. Lett. 36, 118-120 (2011)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-36-2-118

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