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Optics Letters

Optics Letters


  • Editor: Alan E. Willner
  • Vol. 38, Iss. 24 — Dec. 15, 2013
  • pp: 5450–5453

Post-fabrication trimming of athermal silicon waveguides

Stefano Grillanda, Vivek Raghunathan, Vivek Singh, Francesco Morichetti, Jurgen Michel, Lionel Kimerling, Andrea Melloni, and Anu Agarwal  »View Author Affiliations

Optics Letters, Vol. 38, Issue 24, pp. 5450-5453 (2013)

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We experimentally demonstrate the post-fabrication trimming of polymer-coated athermal silicon waveguides by exploiting the photosensitivity of As2S3 chalcogenide glass to near-bandgap visible light. Our technique enables compensation of fabrication tolerances and modification of specific circuit functionalities after fabrication. Moreover, our athermal and trimmable waveguide technology is highly resilient to high optical power, and thus extremely appealing for nonlinear applications. Finally, it enables to fix the absolute wavelength and spectral response of silicon devices with extremely low dependence from temperature and power.

© 2013 Optical Society of America

OCIS Codes
(130.3120) Integrated optics : Integrated optics devices
(230.5750) Optical devices : Resonators
(230.7370) Optical devices : Waveguides

ToC Category:
Optical Devices

Original Manuscript: October 18, 2013
Manuscript Accepted: November 5, 2013
Published: December 13, 2013

Stefano Grillanda, Vivek Raghunathan, Vivek Singh, Francesco Morichetti, Jurgen Michel, Lionel Kimerling, Andrea Melloni, and Anu Agarwal, "Post-fabrication trimming of athermal silicon waveguides," Opt. Lett. 38, 5450-5453 (2013)

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