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Optics Letters

Optics Letters


  • Editor: Xi-Cheng Zhang
  • Vol. 39, Iss. 11 — Jun. 1, 2014
  • pp: 3086–3089

Nanomechanical and optical properties of yttrium thin films by magnetron sputtering

R. Ramaseshan, S. Tripura Sundari, A. K. Balamurugan, Sitaram Dash, A. K. Tyagi, Y. Sato, T. Nakayama, and H. Suematsu  »View Author Affiliations

Optics Letters, Vol. 39, Issue 11, pp. 3086-3089 (2014)

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This Letter reports on nanomechanical and optical properties of yttrium thin films deposited on an Si (100) wafer. Elemental depth profiling by a secondary ion mass spectrometer revealed absence of formation of yttrium hydride, both on the surface and beneath. The optical properties were investigated by spectroscopic ellipsometry, and the refractive indices extracted after suitable modeling were found to be 2.51 at 546 nm. Hardness and elastic modulus of these films were found to be 7 and 142 GPa, respectively. These studies indicate that yttrium thin films are suitable for x-ray mirrors, photocathode emitters in e-beam lithography, electron microscopes, and free-electron lasers.

© 2014 Optical Society of America

OCIS Codes
(120.2130) Instrumentation, measurement, and metrology : Ellipsometry and polarimetry
(120.4530) Instrumentation, measurement, and metrology : Optical constants
(310.6860) Thin films : Thin films, optical properties
(310.6870) Thin films : Thin films, other properties

ToC Category:
Thin Films

Original Manuscript: December 12, 2013
Revised Manuscript: February 28, 2014
Manuscript Accepted: March 31, 2014
Published: May 16, 2014

R. Ramaseshan, S. Tripura Sundari, A. K. Balamurugan, Sitaram Dash, A. K. Tyagi, Y. Sato, T. Nakayama, and H. Suematsu, "Nanomechanical and optical properties of yttrium thin films by magnetron sputtering," Opt. Lett. 39, 3086-3089 (2014)

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  1. W. A. Clay, J. R. Maldonado, P. Pianetta, J. E. P. Dahl, R. M. K. Carlson, P. R. Schreiner, A. A. Fokin, B. A. Tkachenko, N. A. Melosh, and Z.-X. Shen, Appl. Phys. Lett. 101, 241605 (2012). [CrossRef]
  2. M. G. Helander, Science 336, 302 (2012). [CrossRef]
  3. A. Lorusso, F. Gontad, A. Perrone, and N. Stankova, Phys. Rev. Spec. Top. Accel. Beams 14, 090401 (2011). [CrossRef]
  4. G. Caretto, P. Miglietta, V. Nassisi, A. Perrone, and M. V. Siciliano, Radiat. Eff. Defects Solids 163, 365 (2008). [CrossRef]
  5. L. Cultrera, G. Gatti, and A. Lorusso, Radiat. Eff. Defects Solids 165, 609 (2010). [CrossRef]
  6. A. Lorusso, V. Fasano, and A. Perrone, J. Vac. Sci. Technol. A 29, 031502 (2011). [CrossRef]
  7. B. Sae-Lao and R. Soufli, Appl. Opt. 41, 7309 (2002). [CrossRef]
  8. D. J. Santjojo, T. Aizawa, and S. Muraishi, Mater. Trans. 48, 1380 (2007). [CrossRef]
  9. A. T. M. van Gogh, D. G. Nagengast, E. S. Kooij, N. J. Koeman, J. H. Rector, R. Griessen, C. F. J. Flipse, and R. J. J. G. A. M. Smeets, Phys. Rev. B 63, 195105 (2001). [CrossRef]
  10. J. H. Weaver and C. G. Olson, Phys. Rev. B 15, 590 (1977). [CrossRef]
  11. I. I. Papirov, V. V. Vorobev, A. I. Pikalov, and N. I. Moreva, Phys. Stat. Sol. A 65, 141 (1981). [CrossRef]
  12. J. N. Huiberts, R. Griessen, J. H. Rector, R. J. Wijngaarden, J. P. Dekker, D. G. de Groot, and N. J. Koeman, Nature 380, 231 (1996). [CrossRef]
  13. D. Setoyama, M. Ito, J. Matsunaga, H. Mura, M. Uno, and S. Yamanaka, J. Alloys Compd. 394, 207 (2005). [CrossRef]
  14. M. Dornheim, A. Pundt, R. Kirchheim, A. J. v. d. Molen, E. S. Kooij, J. Kerssemakers, and R. Griessen, J. Appl. Phys. 93, 8958 (2003). [CrossRef]
  15. W. C. Oliver and G. M. Pharr, J. Mater. Res. 19, 3 (2004). [CrossRef]
  16. A. Wucher, Appl. Surf. Sci. 252, 6482 (2006). [CrossRef]
  17. A. R. Wildes, R. C. C. Ward, M. R. Wells, and B. Hjorvasson, J. Alloys Compd. 242, 49 (1996). [CrossRef]
  18. S. Jung, H. Choi, Y. Ju, M. Chang, M. Jo, J. Lee, J. Yoon, C. Lee, and H. Ywang, Appl. Phys. Lett. 95, 242112 (2009). [CrossRef]
  19. J. F. Ziegler, M. D. Ziegler, and J. P. Biersack, Nucl. Instrum. Methods Phys. Res., Sect. B 268, 1818 (2010). [CrossRef]
  20. F. Jose, R. Ramaseshan, S. Dash, S. Tripura Sundari, D. Jain, V. Ganesan, P. Chandramohan, M. P. Srinivasan, A. K. Tyagi, and B. Raj, Mater. Chem. Phys. 130, 1033 (2011). [CrossRef]
  21. S. J. van der Molen, J. W. J. Kerssemakers, J. H. Rector, N. J. Koeman, B. Dam, and R. Griessen, J. Appl. Phys. 86, 6107 (1999). [CrossRef]
  22. D. F. Bezuidenhout and R. Pretorius, Thin Solid Films 139, 121 (1986). [CrossRef]
  23. H. Bei, E. P. George, J. L. Hay, and G. M. Pharr, Phys. Rev. Lett. 95, 045501 (2005). [CrossRef]
  24. J. A. Thornton, J. Vac. Sci. Technol. 11, 666 (1974). [CrossRef]
  25. E. O. Hall, Proc. Phys. Soc. B 64, 747 (1951). [CrossRef]
  26. N. J. Petch, J. Iron Steel Inst. 174, 25 (1953).

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